Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2010-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: EXELAN
System Power Rating: 208 AC 3-Phase for system
Loading Configuration: 3 load ports
FI SN: 1017439-10-31-0744
PM 1 SN: 23EX-2536 (F128234-PM1)
PM 2 SN: 23EX-2537 (F128234-PM2)
PM 3 SN: 23EX-2538 (F128234-PM3)
PM 4 SN: 23EX-2539 (F128234-PM4)
Optional Gas
Gas1: C4F8, 50sccm
Gas2: C4F6, 100sccm
Gas3: CHF3, 100sccm
Gas4: CF4, 300sccm
Gas5: CF4, 1000sccm
Gas6: O2, 100sccm
Gas7: CH2F2, 100sccm
Gas8: 30%O2/He, 50sccm
Gas9: H2, 500sccm
Gas10: Ar, 1000sccm
Gas11: N2, 1500sccm
Gas12: O2, 3000sccm
Gas13: empty
Gas14: empty
Gas15: empty
Gas16: empty
TuningGas: 30%O2/He, 50sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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