Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. - UMC

Ebara FREX300 Dielectric

Asset ID: 208731

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Ebara

FREX300 Dielectric

Dielectric CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2002

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: 519528, Singapore

Available date: Currently Available

Inspect to confirm configuration and condition

The system is on line.

All cable are present.

The damaged parts of the equipment are as follows.

1.Robot D assembly

2.Robot D controller

3.HMI

4.Turn table rotate motor

5.Turn table rotate driver​

Handler type is FOUP Loaders.

The robot is YASKAWA and not include pre-aligner and mini- environment.

The supporting equipment include power supply and AC Dist Box.

Facility Requirements: CDA / DIW / Vacuum / Gas(N2) / Power(208V).

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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