Macquarie Semiconductor and Technology on behalf of Macquarie (Asia) Pte Ltd. Taiwan Branch - UMC
Date of Manufacture: 2000
Currently Configured for: 200mm
Current Equipment Status: Available
Location of Equipment: Hsinchu, Taiwan
Available date: Currently Available
Inspect to confirm configuration and condition.
The factory interface is Integrated SMIF.
Sun Sparc Version is 250.
1.OS Version is HP-UX V10.2X
2.Host Version is V3.11
3.EOS Version is V2.92
4.Master Version is V3.03
Last PM Date is 2020/06/05
Off-Line Date is 2020/07/29
Electrical Requirements is 202V.
All the cables are present.
All the covers are present.
Auto Loader is 8".
Magnification Range is 200000X.
Tilt Range is 0~60°.
Resolution is 5nm.
Accelerating Voltage Range is 15000V.
Cryo Pump Make/Model is EBARA/A10S.
The chiller is present.
High SIM resolution : 7nm (30kV)
High SEM resolution : 5nm (1kV)
High quality SEM images ( 1280 X 1024 picls)
Stage tilt : 0∘ to 60∘ (Wafer)
Quick switching between FIB milling and SEI observation modes
Equipped with a C to C auto-loader
Coordinate linkage with optical defect inspection system and laser microscope
Recipe capability for wafer information and observation/milling condition
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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