Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC

Micro-Vu VERTEX 420

Asset ID: 210140

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Micro-Vu

VERTEX 420

Confocal Vision System

Metrology

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Location of Equipment: Lehi, United States

Available date: Currently Available


Feature  

Precision measurement system

Measurement speed: 1600

Measurement accuracy: measuring 1600 points, the maximum tolerance for statistical repeatability 3um, the minimum tolerance 1um

Reverse engineering 4: 1 used for 3D measurement of surface area

2 Export program settings facilitate output

5: 1 complete Chinese Windows2000, operating system

Specifications: US MICRO Vu upto 200mm-1500mm size dimensions

Measuring range stroke: X300 x Y300 x Z150mm X300 x Y300 x Z150 mm

XY Axis accuracy: U2 = 2.6 + L / 1750μm, U2 = 2.6 + L / 1750 micron

Z Axis precision: U1 = 3.0 + L / 150μm, U1 = 3.0 + L / 150 micron

Resolution optical foot resolution: 0.4μm, display 0.1um 0.4 microns, 0.1 micron

Velocity display movement speed: 500mm / s 500 mm / sec

XY-Axis acceleration: 250mm / s2 250 mm / sec

Z Axis acceleration: 100mm / s2 100 mm / sec

2 Stage material: Granite optic / magnification

Optical lens / magnification range: 6.5: 1

Programmable zoom lens / 20x-250x 6.5: 20-250 times

Environmental requirements: 20 ± 2 ° C temperature

Humidity temperature: 20 ± 2 ° C

Humidity: 30-80%.


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