Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: May, 2015
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is stored in an off-site warehouse.
A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.
Production wafes: 100
Pressure control:APC Valve
Process Gas: ZyALD(F.S:1.0sccm),TMA(F.S:500sccm),O3(F.S:20slm,200g/m3),N2,OCTANE
Vaporizer Maker: STEC(TMA,TEMAZ)
Vaporizer TYPE: LSC-F700(TMA),TL-2011(TEMAZ)
MFC Maker: HITACHI-Metals
MFC Model: FCPAR78 series
Process Temp: 200-300deg
Ozonizer Maker: TMEIC
Ozonaizer Type: OP-500H
Pump Maker: EDWARDS
Pump Type: iXH1820
Other missing or damaged parts: Not reported.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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