Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2014
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
AMAT
Producer GT plus
Software Version: pmB5.4_135
System Power Rating: 110 AC 3-Phase for System
Loading Configuration: 3 LP/9 cooling station/ 25 wafer FOUP
Chm/Unit Position A: TEOS GT TWIN, Process Kit, TEOS A; Chemicals / Gases Used: NF3/AR/TEOS/TEOS1/HE_TEOS/O2
Chm/Unit Position B: TEOS GT TWIN, Process Kit, TEOS B; Chemicals / Gases Used: NF3/AR/TEOS/TEOS1/HE_TEOS/O2
Chm/Unit Position C: TEOS GT TWIN, Process Kit, TEOS C; Chemicals / Gases Used: NF3/AR/TEOS/TEOS1/HE_TEOS/O2
Process Unit:TEOS PROD
FOUP Opener:Entegris
Gas Panel Schematic for TEOS
System Overview
Technology: DCVD
Platform Type: PRODUCER GT plus
Application: PMD-PMD
Wafer Size: 300MM (12 INCH)
Wafer Shape: SNNF
Position A: (XW) PE TEOS TWIN
Position B: (XW) PE TEOS TWIN
Position C: (XW) PE TEOS TWIN
Position A Process: (10) DELTA MF OXIDE USG
Position B Process: (10) DELTA MF OXIDE USG
Position C Process: (10) DELTA MF OXIDE USG
Factory Interface System 6.4 FI, Options
WIP Delivery Type: OHT WIP DELIVERY
PreAlignment & Centering: YES
Remote Control System Capable: YES
Number of Loadports: Customer Specify
Docked E99 Reading Capability: YES
Load Port Types and Quantity: 300mm STD
Load Port Operator Interface: STANDARD 8 LIGHT
Air Intake Systems: FFU with Hepa - standard
E84 PIO Sensors & Cables: OHT with Side On Sensor
E99 Carrier ID: E99 Carrier RF Tag Reader
Operator Access Switch: YES
5 COLOR CONFIGURABLE LIGHT TOWER: 5 COLOR CONFIGURABLE LIGHT TOWER
Fast Data Gateway Software: NO
eDiagnostics: NO
Interface A: NO
MainFrame Options
LL High pressure diffuser: High presssure diffuser
LL Copley Driver: Copley Driver
LL Slit Valve: KLR9100 + Zalak tabs
Local Center Finder: YES
Robot Blades: Ceramic
Remote Options, Heat Exchanger
System Heat Exchanger Qty: ONE
AMAT HX Hoses and Manifolds: NO
Facilities UPS Interface: NO
Loadlock chamber: AMAT supplied
Ch A, B & C (XW) PE TEOS TWIN
TEOS Chamber Type: TYPE 2
Cleaning Process Diagnostic: NO
Bevel Edge Control: NOT APPLICABLE
Bottom Liner, Side 1: YES
Bottom Liner, Side 2: YES
RF Generator 1: APEX 3K2P (1 per chuck)
RF Generator 2: AE PDX 900-2V 132
Heater: SZ HEATER, TP, 300MM PRODUCER SE/GT
Slit Valve: G67P + Zalak tabs
RF Filter: ASSY, RF FILTER, DZ HEATER, PRODUCER GT
Foreline Combo Valve: 3 inch Heated Combo ISO / TV
RPS: Astron 6L RPS
Divert: TEOS DIVERT
Gas Pallet Type: K1S SURFACE MOUNT VERTICAL
MFCs: Brooks GF125
Gas Pallet: (300XW10)
Line 1: N2 Purge
Line 2: NF3- 5SLM
Line 3: Ar- 10SLM
Line 4: Empty
Line 5: Empty
Line 6: O2 - 15SLM
Line 7: Empty
Line 8: Empty
Line 9: Empty
Line 10: Empty
Line 11: Empty
Line 12: Empty
Line 13: Empty
Line 14: Empty
Line 15: Empty
Line 16: Empty
Line 17: He - 15SLM
Line 18: N2 Purge
Liquid 1: TEOS - 7G
Liquid 2: TEOS - 7G
Liquid 3: N/A
Gas Box: Gas Box
RF Spoon Strap: RF Spoon Strap
Blocker, Silane: Blocker, TEOS HI DEP RATE
Faceplate, Silane: Faceplate, TEOS HI DEP RATE
C-Channel Side 1: C-Channel Side 1, Silane, 300
C-Channel Side 2: C-Channel Side 2, Silane,
Liner, Ceramic Top: Liner, Ceramic Top
Liner, Ceramic Middle: Liner, Ceramic Middle
Liner, Ceramic Bottom: Liner, Ceramic Bottom
Filler, Chamber 1, Producer SE: Filler, Chamber 1, Producer SE
Filler, Chamber 2, Producer SE: Filler, Chamber 2, Producer SE
Pumping Ring, Ceramic C-channel, Side 1 300mm Prod: Pumping Ring, Ceramic C-channel, Side 1 300mm Prod
Pumping Ring, Ceramic C-channel, Side 2 300mm Prod: Pumping Ring, Ceramic C-channel, Side 2 300mm Prod
Centering Ring, Liner, Bottom, 300mm SE: Centering Ring, Liner, Bottom, 300mm SE
Liner, Nitch, 300 SE: Liner, Nitch, 300 SE
Liner, Equalization, 300 SE: Liner, Equalization, 300 SE
Liner, Top, 300 SE: Liner, Top, 300 SE
Ceramic Isolator: ISOLATOR, CERAMIC, CVD LOW K, 300MM PRODUCER
CH AC Box: SPECIFICATION, CH AC BOX, DUAL ZONE HEATER, PECVD, PRODUCER GT PV R0016
Heater Lift: ASSY, SHASTA NON-CAST RIGID HEATER LIFT, PRODUCER SE/GT
Kit, Lift Pin: Kit, Big Foot Lift Pin
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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