Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2006
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: NIT
Configured with 3 chambers
Tool config is based on original PO, please verify tool details at tool inspection
Software Version: B5.4.135
System Power Rating: 208 AC 3-Phase
Loading Configuration: 2 ENHANCED 25 WAFER FOUP V2 (LOADPORT)
Chm Position 1: PE SILANE SE TWIN CHM A; Chemicals / Gases Used: SiH4_LO, SiH4, H2, NH3, N2, NF3, AR, HE, N2O_HI, N2O_LO, B2H6
Chm Position 2: PE SILANE SE TWIN CHM B; Chemicals / Gases Used: SiH4_LO, SiH4, H2, NH3, N2, NF3, AR, HE, N2O_HI, N2O_LO, B2H6
Chm Position 3: PE SILANE SE TWIN CHM C; Chemicals / Gases Used: SiH4_LO, SiH4, H2, NH3, N2, NF3, AR, HE, N2O_HI, N2O_LO, B2H6
System Configuration
Load Port Types ENHANCED 25 WAFER FOUP V2
WIP Delivery Type OHT WIP DELIVERY
iPUP One iPUP for transfer and loadlock chambers
Wafer detect
RF Generator APEX 3K2P
RPS Astron 2L RPS
Gas Pallet Type K1S SURFACE MOUNT VERTICAL
Basic System
Technology: DCVD
Platform Type: Producer SE
System Software
System software: B5.4_135
FiCGUI: fB5.20_11
GP: 8.10.21.2
DTauMacros: 9.2.44.0
Mainframe
Robot type: 0010-15216(include motor)
Robot Blades: 0040-47126
LL preheater: 0090-02139
slit valve door: 9992-00594
MF pump/LL pump: 0190-25181 (ALCATEL A100L)
Diffucer: RAMPV1199 (tube diffuser)
Chamber Configuration
RF Generator 1: APEX 3000-0920-00137
RF Generator 2: 0190-08677
Heater: Heater ASSY, HA12, MC, CIP Producer (PE) 0010-24300
slit Valve: 9992-00594
Rf Filter: 0090-04736
Foreline TV: CHA.B.C 2-inch heated throttle valve 0190-19203
Foreline ISO: CHA/B/C valve gate 3870-03210
Gas box type(standard or by pass): 0040-86768 (bypass)
Blocker, Silane, 300 Twin: 0020-70842 (bypass)
Faceplate, Silane, 300Twin: 0020-84596
Isolator, Ceramic, Silane 300 Twin: 0200-04235
C-Channel Side 1, Silane, 300: 0200-02407
C-Channel Side 2, Silane,: 0200-02408
Spacer Side 1: 0021-24181
Spacer Side 2: 0021-24182
Liner, Ceramic Top: 0200-02395
Liner, Ceramic Middle: 0200-02396
Liner, Ceramic Bottom: 0200-02397
Lift Pin Floating 300mm Producer SE: 0200-03269
Lift Ring Floating 300mm Producer SE: N/A
RPS: Astron 2L RPS 0920-00013
Gas Box Configuration:
Line 1: SiH4_LO - 500sccm
Line 2: SiH4 - 2SLM
Line 3: B2H6 4SLM (disable)
Line 4: H2 2SLM (disable)
Line 5: NF3 - 5SLM
Line 6: NH3 - 4SLM
Line 7: HE - 15SLM
Line 8: Ar - 10SLM
Line 9: EMPTY
Line 10: N2O_HI - 15SLM
Line 11: N2O_LO - 2SLM
Line 12: N2 - 25SLM
Line 13: N/A
Line 14 Gas: N/A
Line 14 Liquid Pos 1: N/A
Line 15: N/A
Line 16: N/A
Line 17 Gas: N2 Purge
Line 17 Liquid Pos 2: N/A
Line 18: N2 Purge
Line 19: N/A
Line 20 Gas: N/A
Line 20 Liquid Pos 3: N/A
Line 21: N/A
Line 22: N/A
Gas Pallet- DARC only: N/A
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.
