Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. Trias Chamber

Asset ID: 206138

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Tokyo Electron Ltd.

Trias Chamber

Parts/Peripherals

Deposition Equipment

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Asset ID: 206137 206138 206139 206140 chambers parts are packed together 

Tool config is based on original PO, please verify tool details at tool inspection


Chamber Qty 1

Donor mainframe SN: C13973


Gaspanel Configuration

Mass Flow Controller(ClF3 500 sccm): ClF3 500sccm Hitachi Metals SFC1470FAMC-4UGLN

Mass Flow Controller(N2 600/200 sccm): N2 600/2000sccm Hitachi Metals SFC1480FAPDMC-4UGL

Mass Flow Controller(NH3 5000 sccm): NH3 5000sccm Hitachi Metals SFC1481FAMC-4UGL

Mass Flow Controller(NH3 300 sccm): NH3 300sccm Hitachi Metals SFC1480FAMC-4UGL

Mass Flow Controller(N2 600/200 sccm): N2 600/2000sccm Hitachi Metals SFC1480FAPDMC-4UGL

Mass Flow Controller( NH3 1000 sccm): NH3 1000sccm Hitachi Metals SFC1480FAMC-4UGLK

DLI Vaporizer TiCl4 100sccm: TiCl4 100sccm STEC VC1310-UC-19 SEF-8240SL-UC-VM03

Heater Bottm Purge: N2 300sccm Hitachi Metals 280ERC-4VQ


GAS BOX ASSY, 300TIN,SDFAR25-S 

Aire Operation Valves: Fujikin MEGA series

Gas Filter: Covalent Materials CEP-STM-2HS-FV7

Regulator: Veriflo SQ2MICRO302PUPGPA


Process Kit 

STG HTR : 3M87-060128-13 

TiN Shower Base: 3M10-204535-11

V3 SHOWER SPARE (includes below items): 3M87-054539-11

PLATE SHOWER SPACER 300TIN S1: 3M10-150079-11

PLATE SHOWER HEAD 300TIN: 3M10-101634-11

BLOCK,GAS DIFFUSION: 3M10-313563-11

SCREW SHORT HEAD M6*15: 3M10-410281-11

SCREW SHORT HEAD M6*28: 3M10-410282-11

SPRING WASHER SPAK M6: 3M10-410283-11

TUBE,GAS INLET 300TIN: 3M10-410298-11

WASHER FLAT..M6 MA22 RGLR: 032-000841-1 


Major components

1333Pa Manometor: 3M36-000113-11 631C-28494 (MKS)

133kPa Capacitance manometer: 3M36-050152-12 CDG160A-S 133KPA (INFICON)

O-rings: 3M87-032321-1 PARTS KIT,RPL CH O-RING_300T

For stage heater : Dupont KALREZ7075UP AS568A-247 BLK

For lid: Dupont KALREZ4079 AS568A-390 BLK

For gas inlet: Q'ty:3 Dupont KALREZ4079 AS568A-312 BLK

O-rings: 3M87-032311-1 PARTS KIT,RPL GV O-RING_300T

Gate: 3M12-012910-11 FG1232-KL03 (KITZ SCT)

 Gate: Dupont KALREZ4079 AS568A-274 BLK

Gate Valve (Slit Valve): 3M12-012890-22 UXG1232H-KL-77 (KITZ SCT)

APC Valve: 3M12-050473-13 HVR-50HK-R (FUJI IMVAC)

Vacuum valve(VEP1): 3M80-000827-12 IVBH50CA-NWKL-52-W (KITZ SCT)

Vacuum valve(VEP2,3): 3M80-001344-14 IVBH50CY-NWKL-59-W (KITZ SCT)


Other 

Differential Press. Gauge for exhaust system: SUNX DP-M2

Flow Meter for cooling water: Tokyo Flow Meter FF-MRA80-1-TYL3

Water Leak Sensor: Toyokokagaku RS-1000C-NC/RS-1000D-6417

Divert Interlock Interface: Relay unit for collective signal input


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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