Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 5/12/2023
Missing or damaged parts: Fab15 confirmed there are no missing or damaged parts.
Three of four chambers are operating. The other one chamber (PM1) is not in operation but is in good shape.
| OEM | TEL | ||
| Tool Model | Trias | ||
| Process | SFD-W | ||
| Software Version (include revision #) | V5.640R1 | ||
| System Power Rating | 200 AC 3-Phase / 200 AC 1-Phase | ||
| Loading Configuration | FOUP 25 slots cassette V5 (LOADPORT) | ||
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | ||||
| Chm/Unit Position 1 | SFD-W | WF6,ClF3,SiH4,H2,Ar,N2 | |||
| Chm/Unit Position 2 | SFD-W | WF6,ClF3,SiH4,H2,Ar,N2 | |||
| Chm/Unit Position 3 | SFD-W | WF6,ClF3,SiH4,H2,Ar,N2 | |||
| Chm/Unit Position 4 | SFD-W | WF6,ClF3,SiH4,H2,Ar,N2 | |||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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