Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2003-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1304539
Micron MISTI/LID #: L2DOB70100
Vendor Tool Serial #: 53121
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: LAM
Tool Model: VERSMTLHP
System Power Rating: 208 AC 3-Phase
Loading Configuration: 3 load ports
Chamber Name 1: PM1
Chamber Name 2: PM2
Chamber Name 3: PM3
Chamber Name 4: PM4
Chamber 1 Description: MWAVE STRPR
Chamber 2 Description: VERSMTLHP
Chamber 3 Description: VERSMTLHP
Chamber 4 Description: MWAVE STRPR
Optional Gas 1: Main CH#1
Optional Gas 2: Main CH#2
Optional Gas 3: Main CH#3
Optional Gas 4: Main CH#4
Optional Gas 5: Main CH#5
Optional Gas 6: Main CH#6
Optional Gas 7: Main CH#7
Optional Gas 8: Main CH#8
Optional Gas 9: Main CH#9
Optional Gas 11: Strip CH#1
Optional Gas 12: Strip CH#2
Custom Gas Lines 1: BCl3, 200 sccm
Custom Gas Lines 2: Cl2, 500 sccm
Custom Gas Lines 3: O2, 100 sccm
Custom Gas Lines 4: CHF3, 50 sccm
Custom Gas Lines 5: Ar, 500 sccm
Custom Gas Lines 6: CH4, 20 sccm
Custom Gas Lines 7: HCl, 200 sccm
Custom Gas Lines 8: O2, 3000 sccm
Custom Gas Lines 9: N2, 50 sccm
Custom Gas Lines 11: N2, 1000 sccm
Custom Gas Lines 12: O2, 5000 sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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