Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials Centura AP Ultima X

Asset ID: 207035

Print spec sheet

Applied Materials

Centura AP Ultima X

HDP CVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 6/21/2021

CVD - 15-3AMAT_CENT3_HDPN - CENTURA -


HDP-CENTURA[3ch]


A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.

Other missing or damaged parts: Not reported.


[Chamber A]

Chamber Type:Ultima X HDP CVD

Gas Config(sccm)=MFC Full Scale

O2(1000)/NF3(100)/HE(600)/SiH4(300)/H2(1000)/AR(1000)/SiH4(50)/HE(400)/AR(100)/NF3(3000)/AR(3000)

RF Source 1.8-2.17MHz, max 10000 W

RF Bias   13.56MHz, max  9500W

RF RPS   400kHz, max 6000W


[Chamber B]

Chamber Type:Ultima X HDP CVD

Gas Config(sccm)=MFC Full Scale

O2(1000)/NF3(100)/HE(600)/SiH4(300)/H2(1000)/AR(1000)/SiH4(50)/HE(400)/AR(100)/NF3(3000)/AR(3000)

RF Source 1.8-2.17MHz, max 10000 W

RF Bias   13.56MHz, max  9500W

RF RPS   400kHz, max 6000W


[Chamber C]

Chamber Type:Ultima X HDP CVD

Gas Config(sccm)=MFC Full Scale

O2(1000)/NF3(100)/HE(600)/SiH4(300)/H2(1000)/AR(1000)/SiH4(50)/HE(400)/AR(100)/NF3(3000)/AR(3000)

RF Source 1.8-2.17MHz, max 10000 W

RF Bias   13.56MHz, max  9500W

RF RPS   400kHz, max 6000W


Tool is running both IMD and PMD Processes.

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.