Macquarie Semiconductor and Technology on behalf of Macquarie Electronics USA Inc.
Alliance (A6) Exelan HP - Spare Parts
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 200mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: San Jose, United States
Available date: TBD
200mm Spare Parts including process kits from A6 Exelan HP
Process Kits
715-443130-001: Qty 3 Rev C, Qty 1 Rev B (Anodized Aluminum)
715-443129-001: Qty 4 (Ceramic)
922-00753: Qty 4 (Quartz)
716-443084-003: Qty 4 (Quartz)
Installation Screws: x12 + x16
Cables
853-0324220-020 Rev A: Qty 3
853-0324220-050 Rev A
853-495578-030 Rev A: Qty 2
853-495578-050 Rev A: Qty 2
853-495594-030 Rev B: Qty 2
853-495594-050 Rev B: Qty 2
853-495595-030 Rev D: Qty 2
853-495595-050 Rev C: Qty 2
853-494678-010 Rev B
853-494678-010 Rev C
853-494678-020 Rev C
833-491108-002/B Ethernet Interconnect Cable
001-1865-01 Rev C Serial Cable
853-492633-001 Rev A VME Ethernet Cable
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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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