LAM Research 2300 Exelan Flex EX

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

Shipping brackets and kits will need to be supplied by the buyer.

Serial number F123737 in SN plate on Process Chamber 3.

Serial number F123739 in SN Plate on Process Chamber 1.

Serial number on Process Chamber 2: Unknown.

A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.

[Chamber A]

Chamber type:Flex EX

Gas config.(sccm)=MFC full scale

C4F8(50)/CF4(200)/O2(3000)/Ar(1000)/

CO(500)/CH3F(100)/O2(30)/CHF3(100)/

O2(300)/C4F6(50)/Xe(500)/CH2F2(100)/

N2(1000)/COS(30)

Source 60MHz 2000W/27MHz 3000W/2MHz 7000W

Lid Temp Control ~140℃

ESC Temp Control ~60℃

[Chamber B]

Chamber type:Flex EX

Gas config.(sccm)=MFC full scale

C4F8(50)/CF4(200)/O2(3000)/Ar(1000)/

CO(500)/CH3F(100)/O2(30)/CHF3(100)/

O2(300)/C4F6(50)/Xe(500)/CH2F2(100)/

N2(1000)/COS(30)

Source 60MHz 2000W/27MHz 3000W/2MHz 7000W

Lid Temp Control ~140℃

ESC Temp Control ~60℃

[Chamber C]

Chamber type:Flex EX

Gas config.(sccm)=MFC full scale

C4F8(50)/CF4(200)/O2(3000)/Ar(1000)/

CO(500)/CH3F(100)/O2(30)/CHF3(100)/

O2(300)/C4F6(50)/Xe(500)/CH2F2(100)/

N2(1000)/COS(30)

Source 60MHz 2000W/27MHz 3000W/2MHz 7000W

Lid Temp Control ~140℃

ESC Temp Control ~60℃

Other missing or damaged parts: Not reported.