Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials Centura AP Enabler

Asset ID: 10701

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Applied Materials

Centura AP Enabler

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Process: OX

Tool config is based on original PO, please verify tool details at tool inspection

Software Revision    B2.8_79    
FI Software    FB4.70_12    
GEM Software    7.20_17    
Wafer Size    Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch    
Online Connection    GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)    
Inter Face    3 carrier stage (Continuous flow operation) w/ 3 Loadports (Semi compliant MENV and FMS assemblies    
Interface A    Hardware related to EDA    OPT: Site selectable item. NOTE: This may be a cost bearing item.
Corrosion Resistant FI & SWLL    N/A    
Loader Mod Corrosion Prevent    N/A    
Standard SWLL    Standard SWLL    
Side Storage Pod    Side Storage Pod (Left/Right)    Can be configured on the right if necessary for tool clearance issues.
OCR    KIT, YAT BACKSIDE OCR, 300MM 5.3FI    
Facility Plate    N2 Regulator : Supplied by customer in floor, CDA regulator 125 PSI onboard SMC pressure switch    
Facility Plate    Manual Valve : Supplied by customer in floor    
Facility Plate    Pressure Gauge : Supplied by customer on regulator in floor    N/A
Transfer Pressure Monitor    10 Torr Manometer and 1SLM N2 APC, kit    
Transfer Pressure Monitor    GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog    
Load Lock Pressure Monitor    GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog    
Transfer Chamber Blade Kit    Transfer Chamber Accelerator Blade Kit    
LL ISO-Slit Valve Grp Elast.    AP Chemraz 513 Elastomer    
Atmospheric Robot    KAWASAKI A3    
Mainframe Robot    VXP with Dual blade    
Wafer Pass Through    Not available    
Loadport type    Enhanced 25 wafer FOUP    
Loadports    Loadport System    
Open Cassettes Supported    N/A    
Water Leak Detector    Configured    
EMO Type    Turn to Release (Front x3, Rear x4) - 3 on FI, 1 on front of FI and one on each side of FI. Rear: 1 for each process chamber.    
System Monitors    Monitor #1 is Flat Panel with Keyboard on stand / Monitor #2 is through the wall flat panel (optional)    
Cable Length    RF Cable : 2 cables 75 ft; 1Short Cable    2 cables/chamber are 75'; 1 cable is short (within chamber)
Cable Length    Mnitor Cable : 25 Ft 16ft effective    
Cable Length    Pump Cable Length : 75 ft interface cable    
Signal Tower    Red/Yellow/Green/Blue ( Front x1 & Center section of loadside and maintenance side x1)DNET LIGHT TOWER, 4 LIGHT COVER (RAGB) W/ CLR DAUG    
Inter Lock    On board interlocks to dissable RFand gas flow at 1/2 atmos., and lid or gas panel door open.    1/chamber
Inter Locks    On board interlocks to disable robots and slit doors when transfer lid or load lock lids are open.    Reason-There are maintenance routines or wafer recovery procedures that will require the ability to open the lid
and operate the slit valves or robot
Certificate of Cleanliness    N/A    Required in Fab 7 only.
Remote UPS Interface    N/A    Required in Fab 7 only.
Scrubber Interlock    N/A    Required in Fab 7 only
Etch Common AC Rack    Lean AC Rack    
Chiller (wall/source)    "NX20A(ZT150 coolant)
0190-17815"    NOTE: Coolant not shipped with tool.
Chiller (Dual Zone Cathode)    NX20A (ZT130 coolant)    NOTE: Coolant not shipped with tool.
Coolant    "Galden ZT-130 for Cathode
Galden ZT-150 for Wall/Source
Galden FC-3283 for Cathode/Wall/Source
"    NOTE: Coolant not shipped with tool.
Chiller Hose Length    75'    Dual Channel Chiller (U.S. sites use 50'
RF Gen TOP (162Mhz Source)    3500W RF POWER SUPPLY, 162 MHZ, FIXED FREQUENCY, 208VAC, WATER COOLED (0190-29389)    Option 10
RF Gen #1 Bottom (13Mhz Bias)    "RF GENERATOR, 13MHZ 5KW, 300MM, RACK MOUNT)
0190-15319"    
RF Gen #2 Bottom (2 Mhz Bias)    "RF GEN PLASMA 9KW 2MHZ ENI)
0190-29586"    
RF Match    "Y
(0190-25187)"    
IPUP Type    Alcatel A100L (0190-01042)    
Process Chb.1,2,3,&4    (IAEF) Enabler (Front End-E5)    
Endpoint type (Eye-D)    Endpoint type (Eye-D)(0246-00196)    
Plasma State Monitor    Plasma State Monitor (1 per system) (0190-17948)    
Spectrograph    EyeD HP Spectrongraph (0190-28658)    
ESC type (Dual Zone)    ESC type (Dual Zone) (0010-33416)    
Cathode Base    Non-Anodized (0041-05779)    
Cathode N2 Purge    Cathode N2 Purge - Yes    
L-collar Si Insert Ring    L-collar Single Crystal Si Insert Ring 1.5mm step     
TMP    Shimadzu D3403M, 3000 litre    
TMP Back Pressure Monitor    51A11TGA2BA003 (MKS) Foreline Transducer    
Dry Pump    N(ESR80WN (EBARA) ; customer Supply)    
Final Valve, Heater    N/A    
Wfib    Y(Wfib - Mod (Restriction at RTN))    
APC    VALVE THROTTLE GATE VF250-HA WITH NEW CLOSED POSITION SENSOR    
Slit Valves    Anodized (AL) 513 Chemrz    
Pressure Monitor    1,000 mt Head    
Pressure Monitor    100 mt Head    
Pressure Monitor    Transducer 100 Torr Cal Tank    
Pressure Monitor    Chamber ATM Switch : 51A13TGA2AA720 (MKS)    
Pressure Monitor    Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas Switch flow through 600Torr    
Chamber Controller Module    SBC C400MHZ, 3U CPCI, 256MB RAM    
FES Server    FES Server    
NSR# 621632-0    Enabler Chamber FRCII, ratio 1000/1000    FRCII
NSR# 621638-0    Chamber First in Fab for IADB Enabler Chamber    1st tool to a fab only
NSR# 621633-0    Transforma run to run option    option-not configured
Thottle Gate Valve (TGV)    Throttle Gate Valve (TGV) - Ceramic     
Gas Line 1    Gas line 1- C4F6 100 sccm UNIT IFC-125    
Gas Line 2    Gas line 2- CH2F2 100 sccm UNIT IFC-125    
Gas Line 3    Gas line 3- C3F8 50 sccm UNIT IFC-125    
Gas Line 4    Gas line 4- O2_M 300 sccm UNIT-125    
Gas Line 5    Gas line 5- SO2 200 sccm UNIT IFC-125    
Gas Line 6    Gas line 6- CF4 200 sccm UNIT IFC-125    
Gas Line 7    Gas line 7 - C4F6_IGI 5 sccm UNIT-125    
Gas Line 8    Gas line 8 - O2_IGI 5 sccm UNIT-125    
Gas Line 9    Gas line 9- O2_L 50 sccm UNIT-125    
Gas Line 10    Gas line 10- O2_H 5000 sccm UNIT-125    
Gas Line 11    Gas line 11- Ar 2000 sccm UNIT-125    
Gas Line 12    Gas line 12- N2 200 sccm UNIT-125    
Gas Line 13    Gas line 13- CHF3 200 sccm UNIT-125    
Gas Line 14    Gas line 14- C4F8 100 sccm UNIT-125    
Gas Pallet Type    NextGen    
Gas Pallet    ASSY, FULL 6/1/1/6 PALLET, 300MM ETCH NEXT GEN    
Regulators    Regulator on SLD (Inlet to Gas Pannel, 1 per unique gas, 12 max, VCR connection)    Includes independent O2 line
Valves    CKD    
Transducers    Transducers inside MFC's    
Flow Ratio Controller (NSTU)    Flow Ratio Controller (NTSU)    Located in gas panel.
IGI Interlock    N/A    Can flow two at a time.
Filters    MYKROLIS (nickel, VCR, P/N 4020-01285), Nippon (VCR 12 max, P/N 4020-00084)    
Gas Leak Detection Port    External Connection Point    
Gas Panel Exhaust    Top Exhaust    
Gas Panel Facilities Hook Up    Single Line Drop    
Piping    Standard high purity stainless & Exhaust through Gas box    
Final Pressure Switch    At 600 Torr coming from gas pallet, At chambers swithch pressure signal 10 torr half atmosphere    
Purge    N2 (Process Grade N2)    
L-collar Single Crystal Si    L-collar Singe Crystal Si Insert Ring 1.5mm step    Consumable Kit
Source Bottom Ring    QUARTZ RING SOURCE, E5(0200-07362)    Consumable Kit
Quartz Barrier Ring    Quartz Barrier Ring (0200-03170)    Consumbable Kit
TGV o-ring    TGV o-ring (3700-03701)    Consumable Kit
TGV Hard Stop - Ceramic     TGV Hard Stop - Ceramic    
TGV Pads    TGV Pades (0041-03304)    Swap Kit Parts
Source Chiller Bypass    Source Chiller Bypass     
Annular Baffle Heated    Annular Baffle Heated     Swap Kit Parts
Cover, Lower Liner    Cover, Lower Liner    Swap Kit Parts
Upper Liner    SUPPORT LINER (0040-37601)    Swap Kit Parts
Process Kit    Process Kit    Process Kit Parts
Showerhead Assy    "Showerhead Assy, 4mm SiC Top Electrode 
Tokai (0041-32335)"    Process Kit Parts
Aluminum shims    Polymer Shims(0242-55460)    Process Kit Parts - Use Thin Shims.
Plasma Containment Door    Plasma Containment Door    Process Kit Parts

Missing/Damaged Parts List:
Dry pumps are not included with sales
Please inspect tool to reconfirm    

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