Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Since tool has been de-installed and is stored in an off-site warehouse, No photos provided by Fab15.
|Software Version (include revision #)||Ver2.90-Rev011-VSTD3.30d|
|System Power Rating||200 AC 3-Phase for system|
|Loading Configuration||3 Loadport|
|Vendor Chm Model||Chemicals / Gases Used (not to use Micron Proprietary names)|
|Chm/Unit Position 1||Loder Module||-|
|Chm/Unit Position 2||Process ship 1||Ar,C4F8,O2,CF4,CHF3,CH2F2,N2,CO,He|
|Chm/Unit Position 3||Process ship 2||Ar,C4F8,O2,CF4,CHF3,CH2F2,N2,CO,He|
|Drive Mechanisms:||x-axis: linear motor|
y-axis, z-axis, θ: AC servo motor
|Gas System:||Accumulation type(12line) Fujikin||2|
Fab15 confirmed there were no missing or damaged parts.
No shipping kits have been installed on the tool.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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