KLA-Tencor Corp. 2920

Equipment details:

Date of Manufacture: Dec 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Icheon-si, Gyeonggi-do, Korea, Republic of

Available date: 6/23/2021

1.    Model D6

1.    1 * Model, D6

2.    1 * D6h

3.    1 * DFIMS, Phoenix v2.0, VQ

4.    1 * PHX Ship Kit

5.    1 * Line Cond. 75kVA, EL

6.    1* 25 cassette HW, 300mm SW

7.    1* 300mm: DSW 065, Haze, Shiny

8.    1 * Monitoring Gauge Phoenix

9.    1 * GEM/SECS and HSMS

- Software that controls communication between Equipment and customer host system (High Speed Messaging System)

10.  1 * E84 Enablement for OHT with Cables

- Tool software that controls the transfer of carriers (FOUPs) from an Overhead Track (OHT) system to a tool

- Used in conjunction with Hokuyo PI/O devices

- Includes standard 5-meter cables only, but if OHT Hokuyo PI/O devices re required, E84 OHT w/PIO, PHX, DFIMS, DMG should be selected instead

- Intended for use with Phoenix handler

11.  1 * E87 Carrier Management Services, E39 Object Services and E90 Substrate tracking

-Tool software that manages automated and manual carrier (FOUP) transfers to and from the equipment

-Includes Substrate Tracking (E90) and Object Services (E39) E40 Process Job Management and E94 Control Job Management

-Tool software that manages Process Jobs (E40) and Control Jobs (E94 based on E39)

12.  1 * Two Omron Radio Frequency (RF) Carrier ID Readers

-Identifies the name of the carrier (FOUP)

-Intended for use with Phoenix handler and Shinko loadports

-Uses the Omron V640 V3-2 RF ID Reader

-One reader required for each FOUP loadport

13.  1 * Painted Panel Light Curtain with Safety Skirt for Dual FIMS

-Safety skirt is a physical barrier that prevents bodily harm to an operator during FOUP delivery or pick-up at the tool.

-Light curtain adds an emitter and a transceiver to the front of the EFEM and when broken by an operator, it will stop any ongoing FOUP transfer from an OHT.

-Intended for use with DualFIMS Phoenix handler and Isoport loadports.

-Only one Light Curtain and Safety Skirt required per tool

14.  1 * Small Pixel,36,50,65 nm

15.  1 * Microtool AM-3005 (single)

16.  1 * Dual Loadport Info Pad Kit

17.  1 * G4 FIMS Ionization

18.  1 * Opt,DF,Loadport Gasketing,SCE

19.  1 * Opt,Swagelok Fittings

20.  1 * 20m EMO FAC PNL to LC Cable,EL

21.  1 * 20m Main Power Cable, EL

22.  1 * FDC

23.  1 * TBD

24.  1 * IDA

25.  1 * Simulator

26.  1 * Impact

27.  1* Remote Control Client

1 * OPT, SIG TWR,40MM, RYGB,PHX PUMA

1 * OPT, REMOTE CONV, BLOWER, EL

1 * OPT, SW, SIXTEENTH SPEED

1 * OPT, EXTERNAL CABLES, STANDARD, EL

1 * OPT, UPGRD, DBB,4U,IDA

1 * OPT, CA-GENERATOR, XP

1 * OPT, SIMULATOR

1 * OPT, SW,RBS