JUSUNG Engineering Co., Ltd. Cyclone Plus

Equipment details:

Date of Manufacture: Jun 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do,, Korea, Republic of

Available date: Currently Available

1.  Transfer Module 

·  Platform

- Two Load Lock

- Wafer Align Chamber

- Auto Door

- 3 Load Port Module

- 6 Sided Transfer Chamber

- Controller for TMC

·  Cluster Tool Control 

·  Main Power Box 

·  Control Rack

·  Auto Wafer Centering system

1. Semi-batch ALD Al203 Reaction Chamber 

·  Process chamber 

- Aluminum chamber (5 wfs loading) 

- Wafer up/down Ass'y

- Space Divided Plasma Kit

·  Vacuum Ass'y

·  Gas Jungle Box

- In-situ cleaning

·  New heating system

·  Disk RPM Control

·  Software & Controller

·  Heat Exchanger control interface

·  O3 generator control interface

·  2 LDS System

1. Semi-batch ALD Al203 Reaction Chamber

·  Process chamber 

- Aluminum chamber (5 wfs loading) 

- Wafer up/down Ass'y

- Space Divided Plasma Kit

·  Vacuum Ass'y

·  Gas Jungle Box

- In-situ cleaning

·  New heating system

·  Disk RPM Control

·  Software & Controller

·  Heat Exchanger control interface

·  2LDS System

1. Options & CES

·  Swap Kit

·  O3 Generator

·  Auto refill system interface

·  2 * Source Canister (4L) 

·  2* Source Canister (3.2L) 

·  Additional cost for increasing of 03 concentration

·  Dry Pump FDC function

·  2* Powder Trap

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