Macquarie Equipment Trading on behalf of Macquarie Finance Korea Co., Ltd.
Date of Manufacture: Jun 2015
Currently Configured for: 300mm
Current Equipment Status: Available
Location of Equipment: Gyeonggi-do,, Korea, Republic of
Available date: Currently Available
1. Transfer Module
· Platform
- Two Load Lock
- Wafer Align Chamber
- Auto Door
- 3 Load Port Module
- 6 Sided Transfer Chamber
- Controller for TMC
· Cluster Tool Control
· Main Power Box
· Control Rack
· Auto Wafer Centering system
· Process chamber
- Aluminum chamber (5 wfs loading)
- Wafer up/down Ass'y
- Space Divided Plasma Kit
· Vacuum Ass'y
· Gas Jungle Box
- In-situ cleaning
· New heating system
· Disk RPM Control
· Software & Controller
· Heat Exchanger control interface
· O3 generator control interface
· 2 LDS System
· Process chamber
- Aluminum chamber (5 wfs loading)
- Wafer up/down Ass'y
- Space Divided Plasma Kit
· Vacuum Ass'y
· Gas Jungle Box
- In-situ cleaning
· New heating system
· Disk RPM Control
· Software & Controller
· Heat Exchanger control interface
· 2LDS System
· Swap Kit
· O3 Generator
· Auto refill system interface
· 2 * Source Canister (4L)
· 2* Source Canister (3.2L)
· Additional cost for increasing of 03 concentration
· Dry Pump FDC function
· 2* Powder Trap
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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