Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Dainippon Screen Mfg. Co. (DNS) SS-3000

Asset ID: 67432

Print spec sheet

Dainippon Screen Mfg. Co. (DNS)

SS-3000

Wafer Scrubber

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: 10/1/04

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Process: SCRUB


Section 1. Tool General Information  
Micron MISTI #WDNSB7RF00   
Vendor Tool Serial #700808300A(3A56DA0201)   
Date of Tool Move-In    
Tool Availability DateRefer to fan-out list   
Tool Current StatusIn production / De-installed (Pls strike-off accordingly) 
Tool working conditionWorking / Not working with missing parts / Not working (Pls strike-off accordingly)   
Tool LocationFab11 WET PROCESS(Pls indicate nearest area, eg. Fab2 Photo)
     
     
Section 2. Tool Specific Information  
OEMDNS   
Tool ModelSS3000 SCRUB   
ProcessSCRUB_FS Processes   
Software Version    
System Power Rating 208V4W-N(eg. 110 AC 3-Phase for System) 
Loading Configuration3 load ports(eg. 6 load positions for furnace or dual auto-indexer loaders)
Any equipment manuals available?  Yes / No (Pls strike-off accordingly) 
Tool under OEM service contract?   Yes / No(Pls strike-off accordingly) 
* Letter of Declaration to confirm service contract coverage will be provided upon request 
     
For multi-chms system, please indicate the chamber type & include photo of individual chm 
(Section is also applicable to tank configuration for Wet bench)  
 DescriptionChemicals / Gases UsedPhoto Attached
Tank Position   1U03DIW Yes / No
Tank Position   2U04DIW Yes / No
Tank Position   3U05DIW Yes / No
Tank Position   4U06DIW Yes / No
 
System Configuration    
Description   Qty
     
Process Modules   4
IHU   1
MHU   1
Loadport   4
AC power box   1


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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