Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Dainippon Screen Mfg. Co. (DNS) SS-3000

Asset ID: 195198

Print spec sheet

Dainippon Screen Mfg. Co. (DNS)

SS-3000

Wafer Scrubber

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: October 9, 2013

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Sending Site Workstation Name  15-3DNS_SS30_SCR_04SSDS  
Software Version (include revision #) V242B000   
System Power Rating  208AC 3-phase   
Loading Configuration  3 load ports   
   Vendor Chm ModelChemicals / Gases Used  
Chm/Unit Position   1  U03 SS(Surface)CO2Water  
Chm/Unit Position   2  U04 SS(Surface)CO2Water  
Chm/Unit Position   3  U05 SSR(Backside)CO2Water  
Chm/Unit Position   4  U06 SSR(Backside)CO2Water  
Tool:      
Process Unit:  Model:Remark  
Controller:  Process Modules  1
MFC/Pressure Unit:  Loadport  3
Drive Mechanisms:  Power supply unit  1


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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