Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
WET PROCESS 11-3LAM_GXPR_STR_01 NVLS GAMMA STRIP
Tool config is based on original PO, please verify tool details at tool inspection
Tool system is upgraded from GAMMA 2130 to GAMMA Express
STANDARD SPECIFICATIONS
Software Revision : V4.20B10
Factory Automation: OHT PIO Sensor
Wafer Size: Diameter 300+/- 0.05mm
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 3 carrier stage (Continuous flow operation)
Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)
Platform Type: Version 2
UPS on system: Yes
Earth Leakage Breaker: Yes
Monitor: 2(Flat Panel Display Touch Screen Type, 2(QNS /WIN) ; Front, 1(WIN) ;back
Signal Tower: Red/Yellow/Green/Blue (Upper Left of Front x1 & Upper right section of loader on
maintenance side x1)"
EMO: Front x1, Rear x2
PM to Pump Interconnect: 50 ft
Power box for pump: MDP
Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)
Configuration Specifications
MF: Gamma 2130 upgread to xPR
Etch Chamber: Gamma 2130/ Position 1 to position 6
RF Cable Length: RFG to Matcher, 30 ft
Generator: MKS GHW-50A, Max power 5000W + RF match COMET 5KW HI-THLD (XPR type)
chamber kit : Standard
Wafer Lift Mechanism : Fin
O-Rings : Fluorosilicon/TEV
Gate Valve: Barrier seal door
Gas System Type: 4 Gas Configuration
FOUP / ATM Robot / Backend: 3 FOUP / YASKAWA MP2300i controller / YASKAWA MP2300i controller
Factory Automation: OHT PIO Sensor
Cassette ID: Hermos Carrier ID
User Interface Options: Side and front Monitor UI
Interconnect Cables TM_Subpanel: TM to Subpanel, 100ft
Conditioning Station: Conditioning Station
Non Standard Feature: Standard
Gas 1: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522 O2/50 SLM
Gas 2: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522 N2/7 SLM
Gas 3: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522 4%H2N2/20SLM
Gas 4: Gas/ mfc size/ mfc model: STEC SEC-Z500 / SEC-Z512/Z522 CF4/50 SCCM
Damage/Missing parts list
1.LP1 up/down cylinder fault
2.lamp and lamp holder fault of ATM area
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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