Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Dainippon Screen Mfg. Co. SU-3000

Asset ID: 195205

Print spec sheet

Dainippon Screen Mfg. Co.

SU-3000

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: September, 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed by a third party and is stored in an off-site warehouse.


A HARD DISK DRIVE WILL BE REMOVED.


[Chamber A]

 Chemical : AM1(NH4OH/DIW/OTHERS) 70deg

 SPRAY : NANO SPRAY N2 5~20L/min

 Rinse(front/back) :DIW/ CO2 injection ,resistivity <1MΩ

 Spin DRY : N2 100l/min with shield plate, 2500rpm


[Chamber B]

 Chemical : DHF(1:300) 23deg,

 SPRAY : NANO SPRAY N2 5~20L/min

 Rinse(front/back) :DIW/ CO2 injection ,resistivity <1MΩ

 Spin DRY : N2 100l/min with shield plate, 2500rpm


[Chamber C]

 Chemical : AM1(NH4OH/DIW/OTHERS) 70deg

 SPRAY : NANO SPRAY N2 5~20L/min

 Rinse(front/back) :DIW/ CO2 injection ,resistivity <1MΩ

 Spin DRY : N2 100l/min with shield plate, 2500rpm


[Chamber D]

 Chemical : DHF(1:300) 23deg,

 SPRAY : NANO SPRAY N2 5~20L/min

 Rinse(front/back) :DIW/ CO2 injection ,resistivity <1MΩ

 Spin DRY : N2 100l/min with shield plate, 2500rpm


Other missing or damaged parts: Not reported.


Robot and Controller's model name:

Center Robot 12 inch / short

XU-RC615L-A06

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Center Robot Controller

ERCR-RS09-A003

73983283

Indexer Robot 12 inch/SU (Single Wafer Cleaning system)

XU-RC350D-C31

73982956

Indexer Robot Controller

ERCR-RS10-C003

73983282

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