Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. (TEL) CLEAN TRACK LITHIUS

Asset ID: 20500

Print spec sheet

Tokyo Electron Ltd. (TEL)

CLEAN TRACK LITHIUS

Single Block (Coat/Develop)

Resist Processing Equipment

Equipment details:

Date of Manufacture: August, 2005

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is currently stored in an off-site warehouse.

Shipping brackets and kits will need to be supplied by the buyer.


A Hard Disk Drive is not included in tool.


BLOCK DIAGRAMS ARE AVAILABLE.

Tool was configured as a Stand Alone system.



[Track Config 1]

COAT cup:2

Developper cup:3

ADH:1


[Track Config 2]

Resist Reduction:RRC

Dev Nozzle:SH、NLD

Resist pump:RDS 10ml,CRD 4ml


[Oven Config]

COT:CPHP x2

DEV:CPHP x2


[Track Chemicals]

Resist supply:Gallon bottle

Thinner:OK73


Other Missing or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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