Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Applied Materials (AMAT) Endura II Aluminum Interconnect

Asset ID: 209123

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Applied Materials (AMAT)

Endura II Aluminum Interconnect

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

PVD 15-3AMAT_ENDURA2_REFLOW_01 AMAT ENDURA 2 REFLOW


AMAT
ENDURA2
Metal (Al)
eentB4.9_40
400VAC,3phase STAR
208VAC,3phase STAR
3 Load Ports
Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc)  
     
Part Type  Part Description :Part number:Date of Change:Qty
XP robot  Transfer XP Robot0010-283142/1/20201


   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  SIP-TTNAr/N2 
Chm/Unit Position   2  ALPS-AlAr/N2 
Chm/Unit Position   3  Hot-AlAr/N2 
Chm/Unit Position   4  Hot-AlAr/N2 
Chm/Unit Position   5  SIP-TTNAr/N2 
Chm/Unit Position   E  DegasN2 
Chm/Unit Position   F  DegasN2 
Tool:   
Process Unit:  Model:
Controller:  FES (cPCI)
MFC/Pressure Unit:  AERA DN780
Drive Mechanisms:  NA
FOUP Opener:  TDK (TAS-300)
Gas System:  NA
Exhuast System:  NA


No missing or damaged parts.

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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