Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Applied Materials (AMAT) Endura II Front-End Metallization

Asset ID: 207037

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Applied Materials (AMAT)

Endura II Front-End Metallization

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 8/19/2022


Tool Model  ENDURA
Process  Metal  (tungsten)
Software Version (include revision #) 15-3AMAT_ENDURA2_XLRW_01
System Power Rating  enB2.5-1.8
Loading Configuration  400/440/480VAC  3phase STAR   and
200/208VAC 3phase STAR  
   3 Load Ports
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  XLR-W_______________________PAr and PN2__________________________________
Chm/Unit Position   3  XLR-W_______________________PAr and PN2__________________________________
Chm/Unit Position   4  XLR-W_______________________PAr and PN2__________________________________
Chm/Unit Position   E  DMD_______________________ PAr__________________________________
Chm/Unit Position   F  DMD_______________________ PAr__________________________________
Process Unit:  Model:Remark
Controller:  FES (CGA) 
MFC/Pressure Unit:  Brooks GF-125C 150SCCM AR/200SCCM N2/20SCCM AR
Drive Mechanisms:  NA 
FOUP Opener:  SINFONIA (SELOP12F25-S7A0021) 
Gas System:  NA 
Exhuast System:  NA 

Fab15 confirmed there were no missing or damaged parts.

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