Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials (AMAT) Centura AP AdvantEdge G5 Poly

Asset ID: 209057

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Applied Materials (AMAT)

Centura AP AdvantEdge G5 Poly

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

DRY ETCH 15-3AMAT_ADVTG5_PTC3 AMAT CENG5 PTC

Tool has been de-installed and is stored in an off-site warehouse.

Shipping kits installed on a FI unit only for equipment rigging. The shipping kits are required to be shipped back to Fab15.


Missing parts: Qty 3 of SINGLE RING QUARTZ .09HEIGHT .12 RECESS, Part number 0200-05959 reported. Check with Fab15 these missing parts.

Qty 3 of SINGLE RING CERAMIC .50 HEIGHT 300MM HTD ESC (consumable items) are missing.

No other missing or damaged parts. Fab15 confirmed it.


Tool is configured with endpoint but not with the anticorrosion FI Kit.


[Chamber A]

Chamber type:AdvantEdge G5

Gas config.(sccm)=MFC full scale

HBR(400)/CH2F2(100)/CL2(50)/

CL2(400)/O2(10)/O2(100)/HE(400)/

N2(200)/SF6(200)/SF6(30)/CF4(300)/

Ar(400)/CHF3(400)

Source 13.56MHz, max 3000 W

Bias 13.56MHz Hz, max  1500 W

Lid Temp Control ~95℃

ESC Temp Control ~85℃


[Chamber B]

Chamber type:AdvantEdge G5

Gas config.(sccm)=MFC full scale

HBR(400)/CH2F2(100)/CL2(50)/CL2(400)/

O2(10)/O2(100)/HE(400)/N2(200)/

SF6(200)/SF6(30)/CF4(300)/Ar(400)/

CHF3(400)

Source 13.56MHz, max 3000 W

Bias 13.56MHz Hz, max  1500 W

Lid Temp Control ~95℃

ESC Temp Control ~85℃


[Chamber C]

Chamber type:AdvantEdge G5

Gas config.(sccm)=MFC full scale

HBR(400)/CH2F2(100)/CL2(50)/CL2(400)/

O2(10)/O2(100)/HE(400)/N2(200)/

SF6(200)/SF6(30)/CF4(300)/Ar(400)/

CHF3(400)

Source 13.56MHz, max 3000 W

Bias 13.56MHz Hz, max  1500 W

Lid Temp Control ~95℃

ESC Temp Control ~85℃


[Chamber D]

Chamber type:AXIOM

Gas config.(sccm)=MFC full scale

H2/N2(5000)/O2(10000)/N2(1000)

Power max 5000 W


No photos provided. Please inspect to collect photos.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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