Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Sumitomo Precision Products Co., Ltd.
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
OEM: Sumitomo Precision Products Co, Ltd.
Model: SGRC-02GS-025, ozone generator
Reference from OEM :
|Specification of equipment example 1(SGRP-03JS)|
|Ozone gas flow rate||15L/min (5L/min x 3Line)|
|Cooling water temperature||20°C±2°C|
|Dimensions||W570mm x D850mm x H1,870mm|
|Specification of equipment example 2(SGRF-03JA)|
|Ozone gas flow rate||20L/min|
|Cooling water temperature||5°C|
|Dimensions||W570mm x D850mm x H1,836mm|
|Capable of supplying either large capacity ozone gas with one line or multi lines by individual control|
|High concentration; Up to 400g/m3(N)|
|Abundant product line up; Small to large capacity.|
|High pressure; max.0.3MPa(SGRP series)|
|Nitrogen doping free(SGRF series)|
|High pressure tolerance, Long life cycle discharging cell|
|Quick start-up, Quick response|
|Stable concentration by integrated with ozone monitor(Closed-loop control)|
|CE, NRTL, SEMI standard applicable|
|Piping material; Select from 316LSS or PFA|
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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