Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2009-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: KIYOEX
System Power Rating: 208 AC 3-Phase
Loading Configuration: 3 load ports
FI 2300 SN: 1017439-09-50-0422
Chamber PM1 2300 KIYO eSeries SN: R23PL0847 (F167430-PM2)
Chamber PM2 2300 KIYO eSeries SN: R23PL0844 (F160962-PM4)
Chamber PM3 2300 KIYO eSeries SN: 23KY-1082 (F160965-PM3)
Chamber PM4 2300MWAVE STRPR SN: 23ST451313
Chamber PM1: KIYOEX; SiCl4, Cl2, HBr, CF4, BCl3, He, CH2F2, Ar, O2/He, NF3, N2, SO2, SF6, CHF3, O2, C4F6
Chamber PM2: KIYOEX; SiCl4, Cl2, HBr, CF4, BCl3, He, CH2F2, Ar, O2/He, NF3, N2, SO2, SF6, CHF3, O2, C4F6
Chamber PM3: KIYOEX; SiCl4, Cl2, HBr, CF4, BCl3, He, CH2F2, Ar, O2/He, NF3, N2, SO2, SF6, CHF3, O2, C4F6
Chamber PM4: Stripper45; N2, O2, Ar
Optional Gas
#1: SiCl4, 100sccm
#2: Cl2, 500sccm
#3: HBr, 500sccm
#4: CF4, 400sccm
#5: BCl3, 200sccm
#6: He, 500sccm
#7: CH2F2, 200sccm
#8: Ar, 1000sccm
#9: 30%O2/He, 50sccm
#10: NF3, 600sccm
#11: N2, 250sccm
#12: SO2, 200sccm
#13: SF6, 200sccm
#14: CHF3, 200sccm
#15: O2, 500sccm
#16: None
Tuning Gas: C4F6, 200sccm
TuningBallest: He, 300sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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