Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Metal CVD (Chemical Vapor Deposition)
Date of Manufacture: 2018-03-14
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
CVD - 11-3TEL_TRIASEX2PL_HTTIN_04 - HTTN
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1324438
Micron MISTI/LID #: ATTRB7TC00
Vendor Tool Serial #: T15719
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: TEL
Tool Model: TRIASEX2PL
Software Version (include revision #): V5.670R1
System Power Rating: 208V AC 3-Phas
Loading Configuration: 3 lot loading
Retrofit Part Type 1: NA
Retrofit Date of Change 1: 10/09/2022 16:00
Chamber Name 1: PM1
Chamber Name 2: PM2
Chamber Name 3: PM3
Chamber Name 4: PM4
Chamber 1 Description: EXII TIN
Chamber 2 Description: EXII TIN
Chamber 3 Description: EXII TIN
Chamber 4 Description: EXII TIN
Chamber 1 Chemicals Gases Used: TiCl4/NH3/ClF3/N2
Chamber 2 Chemicals Gases Used: TiCl4/NH3/ClF3/N2
Chamber 3 Chemicals Gases Used: TiCl4/NH3/ClF3/N2
Chamber 4 Chemicals Gases Used: TiCl4/NH3/ClF3/N2
OEM Cable 1: Fab to Sub-FAB cable (25m)
OEM Cable Length 1: 25000
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
N2 Load Port Exists 3: No
Optional Gas 1: N2 5slm HORIBA STEC
Optional Gas 2: N2 10slm HORIBA STEC
Optional Gas 3: N2 10slm HORIBA STEC
Optional Gas 4: N2 2slm HORIBA STEC
Optional Gas 5: empty
Optional Gas 6: N2 300sccm HORIBA STEC
Optional Gas 7: TiCl4 300sccm HORIBA STEC SEC-8000F/D series
Optional Gas 8: empty
Optional Gas 9: empty
Optional Gas 10: NH3 10SLM HORIBA STEC
Optional Gas 11: NH3 2SLM HORIBA STEC
Optional Gas 12: ClF3 500sccm HORIBA STEC
Custom Gas Lines 1: NA
Gas TOR 1: NA
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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