Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Axcelis Technologies Inc. HE3

Asset ID: 205730

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Axcelis Technologies Inc.


High Energy Implanter

Ion Implanters

Equipment details:

Date of Manufacture: 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: CUOX

Tool config is based on original PO, please verify tool details at tool inspection

software Version : 4.12.2

Type: Axcelis HE3

Tool ID: IMHEB7A200

Energy Range: 10KeV to 3000KeV with RTEM (Real Time Energy Monitoring Capability)

Dose Range: 10000000000000

Tilt Angle: 5 degrees

Beam Current Range: 1mA (when beam energy in 1.2mev)

Special Installed : BF3 with SDS delivery,PH3 with SDS delivery

Max gas lines: 6

Ion Source: ELS

Platen / Disk (Rev No.): 13 wafer 300 mm process disk with direct drive

Cyro Pump: Brooks_OB-250F x 5 sets, Brooks_OB-8 x 1sets

"Turbo Pump: STP-A2203C2 turbo x 1sets,STP-603 turbo x 3sets,

 MAG-W830C turbo x 1sets"

Pressure Measurement at Process Chamber: GAUGE ION STABIL

Wafer Size: Diameter 300+/- 0.05mm (SEMI M28), 775 +/- 25um, Notch

Toxic Exhaust: Gas Box Exhaust needs to from TOP

Signal Tower: SIGNAL TOWER LIGHT ASSY, 4Light CE certified (RYGB)

Smoke Detector: VESDA Smoke detector system

Loadport Option: 4 Load Port Stations (Brooks)

Implant angle control: two axis variable implant angle ( 7 in two axes , Quad implant capability)

Ion Source Selection: ELS

Processor: Control computer by Linux OS system(Sun)

Cryo Pumps: Edwards Pump Cryo 250 Onboard

Source Rough Pump: Edwards iQDP80

Beamline Rough Pump: Edwards iQDP80-500

Source Turbo pump: STP-A2203C2

Beamline Turbo pump: STP-603 turbo x 3sets,MAG-W830C turbo x 1sets

Position 1: Argon-HP

Position 2: BF3-HP

Position 3: PH3-HP

Position 4: N/A

Position 5: N/A

Position 6: N/A

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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