Macquarie Equipment Trading on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2004
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 1/4/2021
Process: CUOX
Tool config is based on original PO, please verify tool details at tool inspection
Type: Axcelis HE3
Tool ID: IMHEB7A200
Energy Range: 10KeV to 3000KeV with RTEM (Real Time Energy Monitoring Capability)
Dose Range: 10000000000000
Tilt Angle: 5 degrees
Beam Current Range: 1mA (when beam energy in 1.2mev)
Special Installed : BF3 with SDS delivery,PH3 with SDS delivery
Max gas lines: 6
Ion Source: ELS
Platen / Disk (Rev No.): 13 wafer 300 mm process disk with direct drive
Cyro Pump: Brooks_OB-250F x 5 sets, Brooks_OB-8 x 1sets
"Turbo Pump: STP-A2203C2 turbo x 1sets,STP-603 turbo x 3sets,
MAG-W830C turbo x 1sets"
Pressure Measurement at Process Chamber: GAUGE ION STABIL
Wafer Size: Diameter 300+/- 0.05mm (SEMI M28), 775 +/- 25um, Notch
Toxic Exhaust: Gas Box Exhaust needs to from TOP
Signal Tower: SIGNAL TOWER LIGHT ASSY, 4Light CE certified (RYGB)
Smoke Detector: VESDA Smoke detector system
Loadport Option: 4 Load Port Stations (Brooks)
Implant angle control: two axis variable implant angle ( 7 in two axes , Quad implant capability)
Ion Source Selection: ELS
Processor: Control computer by Linux OS system(Sun)
Cryo Pumps: Edwards Pump Cryo 250 Onboard
Source Rough Pump: Edwards iQDP80
Beamline Rough Pump: Edwards iQDP80-500
Source Turbo pump: STP-A2203C2
Beamline Turbo pump: STP-603 turbo x 3sets,MAG-W830C turbo x 1sets
Position 1: Argon-HP
Position 2: BF3-HP
Position 3: PH3-HP
Position 4: N/A
Position 5: N/A
Position 6: N/A
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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