Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

LAM Research 2300 Exelan Flex EX+

Asset ID: 61882

Print spec sheet

LAM Research

2300 Exelan Flex EX+

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: Unknown

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.

Shipping brackets and kits will need to be supplied by buyer.


Serial number on each chamber is 88902 on TM Chamber.

FLEXP-156 on Chamber 1.

FLEXP-157 on Chamber 2.

FLEXP-158 on Chamber 3.


A Hard Disk Drive will be removed from tool.

CONFIGURATION AVAILABLE: PLEASE ASK YOUR SALE PERSON.

Other missing or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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