Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

LAM Research 2300e5 Exelan Flex Series - MF Only

Asset ID: 19649

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LAM Research

2300e5 Exelan Flex Series - MF Only

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Tool Model: FLEXFX 2Z

System Power Rating: 208 AC 3-Phase for system

Loading Configuration: 4 load ports


Mainframe ONLY

This tool is sold with

FI

MF

Gas up frame

Monitor, cover and parts

Gas box

RPDB

Ladder


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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