Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
Date of Manufacture: 2007
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
Application: Light Etch
Tool power off at 12th May 2018
Bath-1: DHF
Operating: 20°C, HF (49%) / DHF (1:200, 1:500), circulation, 15 L/min
Chemical spiking: auto concentration feedback
Bath Material: PTFE
Bath-2: POU
Operating: 70°C, NH4OH/H2O2
DIW Shower (hot / cold)
Bath Material: PTFE
Megasonic: 950 kHz, 2400W (600*4)
Bath-3: POU
Operating: 70°C, NH4OH/H2O2
DIW Shower (hot / cold)
Bath Material: PTFE
Megasonic: 950 kHz, 2400W (600*4)
Bath-4: POU
Operating: 70°C, NH4OH/H2O2
DIW Shower (hot / cold)
Bath Material: PTFE
Megasonic: 950 kHz, 2400W (600*4)
Dryer: SD2 *2
Operating: 49% DHF (1:200), IPA/N2 200°C, 100 L/min
Resistivity monitoring (Horiba)
Bath Material: PTFE
Damaged / Missing parts:
Missing- TEL Part No. CS014-001281-1, FUSE,THERMAL..30177840, Qty 3
Missing- TEL Part No. CS024-025817-1, AIR CYLINDER..CDJ2B16-45Z-B, Qty 2
Damage- TEL Part No. CS1B50-000012-13, PERSONAL COMPUTER..EC-TKL3-T/L, Qty 1
Missing- TEL Part No. CS1B80-002802-11, BOARD,I/O 16 CN, Qty 1
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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