Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture: 2003
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
PHOTO 11-3CAN_ES5_248_01 CANON ES5 248NM
Tool config is based on original PO, please verify tool details at tool inspection
Tool lenses data 8th Dec 2020
Machine Type: FPA6000ES5
Signal Tower: Yes
Light Source Type: EX-Laser
Laser Unit Type: G40K3
Laser Communication: Yes
Illumination System Type: ES5 Relay Optics
Uniformity Sensor Type: UC2
Lens Type: ULEX-04S2
1st Input Lens Type: Exist
2nd Input Lens Type: Eight slots
AFIS Input Optics Type: None
1st Stopper Type None
2nd Stopper Type: Four slots with Iris
Slit Type Type 3
Image Shifter Type: Air Bearing
Image Shifter Shape: Pyramid
Lens NA Type: Type1
Focus Sensor: CCD6
OAS Focus Sensor: CCD1
Focus Tolerance: 0.030 (um)
Wide Range Focus: 5.0 (um)
Tilt Tolerance wx/wy: 2.0 (ppm)
OAS Focus Tolerance: 0.150 (um)
AA Option Pattern Visible: Yes
AA(Pre.) Bypass: Yes
AA(OAS) Il. Option Mode: No
Wavelength: B2 (590+-60)
Sigma: Sigma0.9 (diffusion plate)
Reticle Cassette Type: Standard
Reticle Size: 6inch
Reticle Thickness: 6.3mm
Reserve Reticle ID: None
Reticle SMIF: Exist
Reticle Stock: Exist
TAG Type: HERMOS TAG
TAG Control: Special-1
Reticle Barcode Type: Code3of9/C.D
Particle Checker Type: PPC
Pellicle Type: Type-A
Pellicle Height: 6.3mm
Pellicle Check: Yes
New PPC Unit: Old
Carrier System: Type10-L
Wafer Size: 12inch
Wafer Shape: NOTCH
Wafer Material: Silicon Wafer
WF Interface System: Open Car
Carrier Slot No.: 25
Wafer Carrier Size D1: 36.000 (mm)
Wafer Carrier Size D2: 15.000 (mm)
Hand Thickness: 2.000 (mm)
Wafer Thickness: 0.775 (mm)
GEM2 (included ESPA): Yes
Online: GEM2
Damage/Missing parts list
Please inspect tool to reconfirm
Damage- FINGER UNIT,RH TYPE 10 (PSR finger hand3 broken)
Damage- 15 Inch Industrial Panel PC (Panel PC not work in both side)
Damage- PSR structure(SH) (PSR inner cable support frame broken)
Damage- Slit(6%)
Damage- optical disk(MO)
Damage- IL MPOS Slit(6%)
Damage- Lifetime due- CPSU PW1 metal mulfunction
Missing- EWS memory
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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