Canon FPA-6000 ES5

Equipment details:

Date of Manufacture: 2003

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

PHOTO 11-3CAN_ES5_248_01 CANON ES5 248NM

Tool config is based on original PO, please verify tool details at tool inspection

Tool lenses data 8th Dec 2020 

Machine Type: FPA6000ES5           

Signal Tower: Yes              

Light Source Type: EX-Laser            

Laser Unit Type: G40K3             

Laser Communication: Yes              

Illumination System Type: ES5 Relay Optics        

Uniformity Sensor Type: UC2              

Lens Type: ULEX-04S2           

1st Input Lens Type: Exist             

2nd Input Lens Type: Eight slots          

AFIS Input Optics Type: None              

1st Stopper Type None              

2nd Stopper Type: Four slots with Iris      

Slit Type Type 3             

Image Shifter Type: Air Bearing          

Image Shifter Shape: Pyramid            

Lens NA Type: Type1             

Focus Sensor: CCD6              

OAS Focus Sensor: CCD1              

Focus Tolerance: 0.030 (um)

Wide Range Focus: 5.0 (um)

Tilt Tolerance wx/wy: 2.0 (ppm)

OAS Focus Tolerance: 0.150 (um)

AA Option Pattern Visible: Yes              

AA(Pre.) Bypass: Yes              

AA(OAS) Il. Option Mode: No               

Wavelength: B2 (590+-60)          

Sigma: Sigma0.9 (diffusion plate)   

Reticle Cassette Type: Standard            

Reticle Size: 6inch             

Reticle Thickness: 6.3mm             

Reserve Reticle ID: None              

Reticle SMIF: Exist             

Reticle Stock: Exist             

TAG Type: HERMOS TAG           

TAG Control: Special-1           

Reticle Barcode Type: Code3of9/C.D          

Particle Checker Type: PPC              

Pellicle Type: Type-A             

Pellicle Height: 6.3mm             

Pellicle Check: Yes              

New PPC Unit: Old              

Carrier System: Type10-L            

Wafer Size: 12inch             

Wafer Shape: NOTCH             

Wafer Material: Silicon Wafer         

WF Interface System: Open Car            

Carrier Slot No.: 25

Wafer Carrier Size D1: 36.000 (mm)

Wafer Carrier Size D2: 15.000 (mm)

Hand Thickness: 2.000 (mm)

Wafer Thickness: 0.775 (mm)

GEM2 (included ESPA): Yes              

Online: GEM2              

Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales