Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Rorze RSC222

Asset ID: 209904

Print spec sheet

Rorze

RSC222

Wafer Sorter

Wafer Automation / Wafer Environment

Equipment details:

Date of Manufacture: 2007 / 02

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

No photos provided by Fab15 since tool has been de-installed by the OEM and is stored in an off-site warehouse.

Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts. They confirmed there were no functionality issues with tool.


OEM  ROEZE CORPORATION
Tool Model  C7RSC131-001-001
Process  Wafer Transfer
Software Version (include revision #) N/A
System Power Rating  200 AC 3-Phase
Loading Configuration  2 load Foup positions  & 1 load Tray position
Description     Qty
Tool:      
Process Unit:Clean robot  Model:RR717L1521-3A6-211Remark 1
Controller:PC   LCD_Touch panel 
MFC/Pressure Unit:Vacuum (生産真空)  -67Pa-93Pa 40L/min1
Drive Mechanisms:Wafer movement by robot arm      
FOUP Opener:Load port  RV201-F05-008-1  2
Gas System:BulkGas (乾燥空気)  0.60.7MPa or more   50L/min1
Exhuast System:N/A      
Safety:
EMO
Earth leakage breaker
Three color signal lamp


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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