Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: 2007 / 02
Currently Configured for: To be determined
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
No photos provided by Fab15 since tool has been de-installed by the OEM and is stored in an off-site warehouse.
Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts. They confirmed there were no functionality issues with tool.
|Software Version (include revision #)||N/A|
|System Power Rating||200 AC 3-Phase|
|Loading Configuration||2 load Foup positions & 1 load Tray position|
|Process Unit:Clean robot||Model:RR717L1521-3A6-211||Remark||1|
|MFC/Pressure Unit:Vacuum (生産真空)||-67ｋPa～-93ｋPa 40L/min||1|
|Drive Mechanisms:Wafer movement by robot arm|
|FOUP Opener:Load port||RV201-F05-008-1||2|
|Gas System:BulkGas (乾燥空気)||0.6～0.7MPa or more 50L/min||1|
|Earth leakage breaker|
|Three color signal lamp|
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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