Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Kokusai Electric Co., Ltd Zestone-III(C) DJ-1223V

Asset ID: 9851

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Kokusai Electric Co., Ltd

Zestone-III(C) DJ-1223V

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 01-Oct-2002

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: 9/1/2021

ZestoneIII(CN)DJ-1223V
1-Tube Thick Nitride 300mm
- Dual Boat, One Reactor Configuration for
DCS/NH3 Nitride (Si3N4)
- Boat Rotation
- UPS (AC 120V)
- SEMI S2-0200E Compliance

- Future retrofitability for NanoSpec 9000i
integrated metrology
* RHC, Rapid Heating Canister
* Rear Operation Panel........
* Hard Gas Pattern Panel (2pcs)..
* POD ID Reader (Including Software).......
* NF3 Self-Cleaning for Thick Nitride....

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