Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Kokusai Quixace II ALD High-k

Asset ID: 84906

Print spec sheet

Kokusai

Quixace II ALD High-k

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available

Section 1. Tool General Information  
Micron MISTI/LID #  KNITB7NB00
Vendor Tool Serial #  T2DC6-14632-1
Month / Year of Tool Move In  17-Feb-11
Tool Availability Date  10/4/2019
Tool Current Status De-installed
Tool working condition  Working
Tool Location  warehouse
Any modification/conversion/refrofit was perform to the tool?  No
    
Section 2. Move-out constraint  
Any layout/move-out path constraint  No
If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap.   
Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer.
    
Section 3. Tool Specific Information  
OEM  Hitachi Kokusai Electric Inc.
Tool Model  DJ-1236V_DF
Process  SIN
   
Software Version (include revision #)  V01.50.00
System Power Rating  120VAC 1PHase
Loading Configuration  5 lots Loading
    
Tool under OEM service contract?     No
*All OEM cable connecting between FAB to SubFab are require to be list out (Include length in mm)
FNC-Power Box Unit(power cable)10m
FNC-Power Box Unit(signal cable)25m
FNC-Pump Unit(signal cable)25m
Blower-Power Box Unit(signal cable)25m


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