Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. (TEL) ALPHA-303i TEOS

Asset ID: 209940

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Tokyo Electron Ltd. (TEL)

ALPHA-303i TEOS

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: Sep 2005

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 1/14/2022

OEM  TEL
Tool Model  α-303i WAVES-300
Process  TEOS
Software Version (include revision #) V2.06
System Power Rating  200 AC 3-Phase
Loading Configuration  2 load positions for furnace or dual auto-indexer loaders
   Yes
Description   
Tool:   
Process Unit:Mid-Temp. VMM-56-002   5zone / 500-1000©Model:
Controller:AGC   
MFC/Pressure Unit:STEC(SEC-Z500 series)  
Drive Mechanisms: N2, Electricity  
FOUP Opener:2 ports   
Gas System:Pure-N2, O2, TEOS  
Exhuast System: New type(EDWARDS Pump)  
*All OEM cable connecting between FAB to SubFab are require to be list out (Include length in mm)
Cartridge Heater   
T/C for Heater Control   
T/C for Over temperature Protection   
5-P T/C for Cascade Control   
Safety:
EMO switch
Braker


Missing or damaged parts: Fab15 confirmed there were no missing or damaged parts.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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