Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: July, 2015
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
DIFFUSION 15-3TEL_FOR_HIKZACDV TEL FORMULA
Tool has been de-installed and is stored in an off-site warehouse.
|Process||AlO+ZrO (Dual ZAC)|
|Software Version||Ver.2.12 R008|
|System Power Rating||400V 3P-Y 3W for System,|
|200V 1P for O3 generator|
|Indicate all modification/conversion/retrofit parts and high cost part replacement history (e.g robots, ESC, Heaters, etc)|
|Part Type||Part Description :||Part number:||Date of Change:||Qty|
|Vaporizer aluminum block heater||TL-2014→TL2011||2|
|Panel,IGS||Removed to prevent final valve heat||3810-334990-11||1|
|PANEL,VALVE BOX FNC||Modification of drilling to prevent valve heat||3810-123606-11||1|
|PTFE Filter evaluation||Install PTFE filter between 3way VLV to manifold||810-100662||2|
|Chm/Unit Position 1|
|Chm/Unit Position 2|
|Chm/Unit Position 3|
|Chm/Unit Position 4|
SYSTEM CONFIGURATION DETAILS, GAS FLOWS CAHRT AND DATAT OF TOOL MAINTENANCE ARE AVAILABLE.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.