Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: 2013-2
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 5/20/2022
| OEM | Tokyo Electoron | ||
| Tool Model | TEL Formula | ||
| Process | AlO+ZrO | ||
| Software Version (include revision #) | Ver.2.12 R008 | ||
| System Power Rating | 400V 3P-Y 3W for System, | ||
| Loading Configuration | 5 lots loading | ||
| Description | |||||
| Tool:TEL_FORMULA_ALDZROX | |||||
| Process Unit: | Model: | Remark | |||
| Controller: | |||||
| 1 | APC | VYX-0276-CONT | |||
| MFC/Pressure Unit: | |||||
| 1 | MASS FLOW CONTROLLER | HORIBA STEC | Z512MGXC-24W2 | ||
| 2 | MASS FLOW CONTROLLER | HORIBA STEC | Z522MGXC-24W2 | ||
| 3 | MASS FLOW CONTROLLER | HORIBA STEC | G111AMC-W-1.5-SUC | ||
| 4 | MASS FLOW CONTROLLER | HORIBA STEC | G111AMC-4CR-SUC | ||
| Drive Mechanisms: | |||||
| 1 | Rotation FOUP Storage | ||||
| FOUP Opener: | 1 Ports | ||||
| Gas System: | |||||
| 1 | Gas Unit (IGS) | N2,HCl,O3,O2,ZyALD,OCTANE,TMA | |||
| 2 | BAKING UNIT | HORIBA STEC | LSC-F530-711GS | ||
| 3 | VAPORIZER SYSTEM | HORIBA STEC | TL-2011L-06U | ||
| Exhuast System: | |||||
| 1 | CAPACITANCE MANOMETER | MKS | 631A02TBEH3 | ||
| 2 | CAPACITANCE MANOMETER | MKS | 631A13TBEH3 | ||
| 3 | CAPACITANCE MANOMETER | MKS | 631A11TBEH3 | ||
| 4 | CAPACITANCE MANOMETER | MKS | 631A11TBEH4 | ||
| 5 | CYLINDER VALVE | CKD | VEC-VH8-X0110/VYX-0276-CONT | ||
| *All OEM cable connecting between FAB to SubFab are require to be list out (Include length in mm) | |||||
| 1 | Tube Material : Quartz | ||||
| 2 | Boat Material : Quartz | ||||
| 3 | Pressure control : APC Valve | ||||
| 4 | Production wafer : 50 | ||||
| 5 | Process Temp 200~300degC | ||||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.