Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

P.S.K. Tech Inc. Supra IV

Asset ID: 211075

Print spec sheet

P.S.K. Tech Inc.

Supra IV

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Process: Asher strip 

Software Version: 1.91 

System Power Rating: 208V 3-Phase 

Loading Configuration: 3 load position


Chm/Unit Position 1- 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2

Chm/Unit Position 2- 2 stage / chamber; Chemicals / Gases Used: PO2/PN2/4%H2N2


Main Body

Load Port: Fixed Buffer

System wide corrosion free: Yes(SUS304)

Wafer Breakage Detection

LCD Monitor: VX1500M-T


System Controller

CPU

Hard disk

1st data back-up

2nd data back-up

Operation Monitor- 15" LCD

Signal Tower- 4 color Dual Polemount Type

R.C.S(Remote Control System)


Utility

Circuit Break Type: MCCB Type

UPS Power: 1ψ 208VAC 60HZ 63A

Power Vaccine: 1sec

Electric & signal cable Length: 20M

UPS Battery: YES

Circuit Break Type: MCCB Type

Water Manifold valve: Shut off v/v

Circuit Break Type: MCCB Type


Transfer module

TM ROBOT Body

TM ROBOT Controller

TM ROBOT Power box

EFEM ROBOT


Chamber 1

Dry Pump

APC valve

APC Controller

Baratron Sensor

Pressure Transducer (pirani)

EPD Controller

Heater Module

FCIP-Generator

Gas Box- IGS Type

Pressure Control- Throttle Valve

Chamber 1 process gas line

GAS #1(O2): 20slm

GAS #2(N2): 3slm

GAS #4(H2N2): 5slm 

GAS #6(CHF3): 500sccm

Purity: 10RA

MFC Signal: Digital

Gas Line Polishing: Electrical Polished

Regulator

Air Operated Valve

Filter

Pressure Transducer


Chamber 2

Dry Pump

APC valve

APC Controller

Baratron Sensor

Pressure Transducer (pirani)

EPD Controller

Heater Module

FCIP-Generator

Gas Box- IGS Type

Pressure Control- Throttle Valve

Chamber 2 process gas line

GAS #1(O2): 20slm

GAS #2(N2): 3slm

GAS #4(H2N2): 5slm 

GAS #6(CHF3): 500sccm

Purity: 10RA

MFC Signal: Digital

Gas Line Polishing: Electrical Polished

Regulator

Air Operated Valve

Filter

Pressure Transducer


Damage/Missing parts list

Damage- Chamber B pump line heater jacket control (CTR2-3)- Qty 1

Damage- chamber A gas 3/5 reugulator- Qty 2 

Damage- chamber A gas 3/5 reugulator- Qty 2

Damage- Chamber A pump line heater jacket control (CTR1-3)- Qty 1

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales


Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.