Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

P.S.K. Tech Inc. Supra IV

Asset ID: 12250

Print spec sheet

P.S.K. Tech Inc.

Supra IV

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Section 1. Tool General Information  
Micron MISTI/LID #  WPSKBEAK00
Vendor Tool Serial #  PSK07050
Month / Year of Tool Move In  20/4/2007
Tool Availability Date  1/31/2019
Tool Current Status De-installed
Tool working condition  Working
Tool Location  Warehouse
Any modification/conversion/refrofit was perform to the tool?  No
    
Section 2. Move-out constraint  
Any layout/move-out path constraint No
If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap.   
Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer.
    
Section 3. Tool Specific Information  
OEM  PSK
Tool Model  Supra IV
Process  Asher strip 
Sending Site Workstation Name  11-3PSK_S4_PICP_STR
Software Version (include revision #) 1.91
System Power Rating  208V 3-Phase 
Loading Configuration  3 load position
    
Tool under OEM service contract?    No
System Configuration  
Description  
Tool:  
HARDWARE CONFIGURATIONDescriptionDetail Description
Main Body
Load PortFixed Buffer
Main BodySystem wide corrosion freeYes(SUS304)
Main BodyWafer Breakage Detection 
Main BodyLCD MonitorVX1500M-T
System ControllerCPU 
System ControllerHard disk 
System Controller1st data back-up 
System Controller2nd data back-up 
System ControllerOperation Monitor15" LCD
System ControllerSignal Tower4 color Dual Polemount Type
System ControllerR.C.S(Remote Control System) 
UtilityMain Power3ψ 208VAC 60HZ 250A
UtilityUPS Power1ψ 208VAC 60HZ 63A
UtilityPower Vaccine1sec
UtilityElectric & signal cable Length20M
Utility UPS BatteryYES
UtilityCircuit Break TypeMCCB Type
UtilityWater Manifold valveShut off v/v
UtilityAll Utility Feed DirectionBottom-up feed
Utility  
Transfer moduleTM ROBOT Body 
Transfer moduleTM ROBOT Controller 
Transfer module
TM ROBOT Power box 
Transfer moduleEFEM ROBOT 
Chamber 1  
Chamber 1APC valve 
Chamber 1APC Controller 
Chamber 1Baratron Sensor 
Chamber 1Pressure Transducer (pirani) 
Chamber 1EPD Controller 
Chamber 1Heater Module 
Chamber 1PICP 
Chamber 1
Generator 
Chamber 1Gas BoxIGS Type
Chamber 1Pressure ControlThrottle Valve
Chamber 1 process gas lineGAS #1(O2)10slm
Chamber 1 process gas lineGAS #2(N2)3slm
Chamber 1 process gas lineGAS #3(NH3)5slm 
Chamber 1 process gas lineGAS #4(H2N2)5slm 
Chamber 1 process gas linePurity10RA
Chamber 1 process gas lineMFC SignalDigital
Chamber 1 process gas lineGas Line PolishingElectrical Polished
Chamber 1 process gas lineRegulator 
Chamber 1 process gas lineAir Operated Valve 
Chamber 1 process gas lineFilter 
Chamber 1 process gas linePressure Transducer 
Chamber 2  
Chamber 2APC valve 
Chamber 2APC Controller 
Chamber 2Baratron Sensor 
Chamber 2Pressure Transducer (pirani) 
Chamber 2EPD Controller 
Chamber 2Heater Module 
Chamber 2PCIP 
Chamber 2Generator 
Chamber 2Gas BoxIGS Type
Chamber 2Pressure ControlThrottle Valve
Chamber 2 process gas lineGAS #1(O2)10slm
Chamber 2 process gas lineGAS #2(N2)3slm
Chamber 2 process gas lineGAS #3(NH3)5slm 
Chamber 2 process gas lineGAS #4(H2N2)5slm 
Chamber 2 process gas linePurity10RA
Chamber 2 process gas lineMFC SignalDigital
Chamber 2 process gas lineGas Line PolishingElectrical Polished
Chamber 2 process gas lineRegulator 
Chamber 2 process gas lineAir Operated Valve 
Chamber 2 process gas lineFilter 
Chamber 2 process gas linePressure Transducer 


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