Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

Hitachi (Semiconductor) CG5000

Asset ID: 11760

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Hitachi (Semiconductor)



Metrology Equipment

Equipment details:

Date of Manufacture: 12-Jul-14

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Icheon-si, Gyeonggi-do, Korea, Republic of

Available date: 10/20/2021

  1. CG5000 (3PORT,300mm Wafer Use, AC208V/60Hz)
    1. Main Unit
    2. Mini-Environment transfer system
    3. New Type C to C Auto-Loader with Load/Lock System
    4. E-chuck Stage System
    5. Display Unit
    6. Power Supply Unit
    7. Water Circulator with power cable and pipe
    8. Optical Microscope (xl 10, x220)
    9. Ion pump back-up Power supply unit
    10. SE-Gun Back-up Power supply unit
    11. Power cable (I5M:Main<->PS)
    12. Electrified Sample Correction (SPM)
    13. Auto calibration system by using stub pattern
    14. Multi-Point/Gap/Corner Radious measurement function
    15. Image filing function
    16. Recipe Queue
    17. ArF Package software
  2. Std. Accessories(Hardware) 
    1. 3* TDK FOUP Opener (including RFID) 
    2. Dry Pump Interface for Boe Edwards iGXl00 
    3. Signal Light Tower (Hynix Spec) 
    4. *Detail spec is same as existing CG5000 at MIO. Light Curtain 
    5. X, Y Dual Microscale 
    6. Energy filter 
    7. Ioniser 
  3. Std. Accessories(Software) 
    1. New Edge Roughness Measurement 
    2. DS/T-PC Link Connection Licence
    3. Line Width roughness analysis function
    4. Flat scan function 
    5. Maximum Mag.To 500K
    6. GEM Communication 1/F 
    7. HSMS Communication 1/F 
    8. Hynix Spec GEM 300 I HSMS /SECS
    9. SECS Communication I/F
    10. CD Data Transfer at CG5000 (um->nm)
    11. Measurement Image Upload function (using FTP) FDC function
    12. Lowest Yacc 200Y modification
    13. Highest Yacc 5000Y modification
    14. Flexible scan function
    15. Self alignment double pattern measurement function
    16. Template generator function
    17. Environment Test Fee
  4. Shield cover for CG5000

The following items are NOT included.

• HARC observation function (Pre-Dose,Optics modification)

• KRF Defect review Network 1/F

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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