Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)

Applied Materials (AMAT) Endura II Front-End Metallization

Asset ID: 195179

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Applied Materials (AMAT)

Endura II Front-End Metallization

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taichung City, Taiwan

Available date: Currently Available

Process: CO


Tool config is based on original PO, please verify tool details at tool inspection


Mainframe Type: Endura2 MR


Chamber A cooldown chamber

Chamber B cooldown chamber

Chamber C PCXT

Chamber D PCXT

Chamber E (MF) DMD

Chamber F (MF) DMD

Chamber 1 ALPS CO

Chamber 2 HT SIP (not use, missing parts)

Chamber 3 HT SIP (not use, missing parts)

Chamber 4 ALPS CO

Chamber 5 ALPS CO


Line Frequency:60Hz

Line Voltage:200/208 VAC Platform / 480V


Chamber A & B: Process Cool

Heater Type: Cooled Pins

Manometer: Convectron


Chamber C & D: Process Clean

Leak Check Port

Manometer: Convectron, Single 100mTorr

RF Generator: Comdel 2/13,56 MHz Dual


Chamber E & F: Process Degas

Heater Type: Grooved

Manometer: Convectron


Chamber 1 & 4 & 5:Process ALPS CO

Heater Type: MCA Dual-Zone CVD

Leak Check Port

Manometer: Convectron, Single 100mTorr

Process Shutter

DC Generator: Advanced Energy 20KW


Chamber 2 & 3:Process HT SIP (not use, missing parts)

Heater Type: MCA Dual-Zone CVD

Process Shutter

DC Generator: Advanced Energy 20KW


Gas Delivery

Gas Feed: Bottom


Chamber A & B

Gas Line Stick Position#1

Process: Ar

Regulator: Yes


Chamber C & D

Gas Line Stick Position#1

Process: Ar

MFC Size: 20

Regulator: No

Gas Line Stick Position#2

Process: Ar

MFC Size: 200

Regulator: No


Chamber E & F

Gas Line Stick Position#1

Process: Ar

Regulator: Yes


Chamber 1 & 4 & 5

Gas Line Stick Position#1

Process: Ar

MFC Size: 20

Regulator: No

Transducer: No

Gas Line Stick Position#2

Process: Ar

MFC Size: 100

Regulator: No

Transducer: No


Fab Interface

Signal Lamp Tower Location: Front Mounted

Signal Lamp Tower Colors: Clear A-B-G

Lamp Tower Lamp Size: 40nm

RF On Indicator: Per Chamber

RF ON Indicator Lamp Color: Red


System Controller

UPS Options: Local UPS (UPS in system Controller)


Factory Interface Options

Front End Interface: Front End with AGV Interface

Bar Code Reader: Yes

Load Port Types: Wafer FOUP

E84 Carrier Handoff: Upper E84 Interface Enabled (OHT)

OHT Light Curtaun: No


Equipment Integration Module

Module Controller: No

iAPC: No


Heat Exchanger/Chiller

Heat Exchangers: Nesla DIMAX


System Monitors:

Monitor Type: VGA monitor with lightipoen

Monitors: Wall Mounted

Monitor Cart: None

System Printer: Inkjet Printer


HAPS Abatement

Edwards Abatement Power: 110V/60HZ


Umbilicals

Heat Exchanger/Chiller Cable Length: 75ft

DPA Generator Rack Cable Length: 75ft

Pumps Cable length: 75ft

Remote Monitor Cable Length: 75ft

Second Monitor Cable Length: 15ft


Process Chamber Roughing Pumps Options

Ebara EWR-80N Qty:6 (not sold with tool)

Pumps Interface Type: Ebara A/AA


Damage/Missing parts list

Chamber 2 & 3 have missing parts

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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