Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.

Tokyo Electron Ltd. (TEL) Tactras Vesta NV3

Asset ID: 207710

Print spec sheet

Tokyo Electron Ltd. (TEL)

Tactras Vesta NV3

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do,, Korea, Republic of

Available date: Currently Available

  1. Main Frame
    1. 1 * Loader Module
      1. 3 * Load Port Unit
    2. 1 * Vaccum Transfer Module
      1. 1* Transfer Module
      2. 2*Loadlock Module
    3. 4 * Process Module​
      1. 4 * Process Module
        1. PM1: Vesta NV3
        2. PM2: Vesta NV3
        3. PM5: RF-3
        4. PM6: Vesta NV3
      2. 3 * HF RF Power Supply
      3. 4 * Gas Box
      4. 3 * RF Generators
      5. 3 * TMP Controller
  2. Support Equipment
    1. 2 * AC Distribution Box

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.