Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)
Date of Manufacture: 2004
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
| Section 1. Tool General Information | |||
| Micron MISTI/LID # | CMP7019 | ||
| Vendor Tool Serial # | 405313 | ||
| Month / Year of Tool Move In | 6/1/2004 | ||
| Tool Availability Date | 1/27/2021 | ||
| Tool Current Status | De-installed | ||
| Tool working condition | Not working with missing parts | ||
| Tool Location | Warehouse | ||
| Any modification/conversion/refrofit was perform to the tool? | |||
| Section 2. Move-out constraint | |||
| Any layout/move-out path constraint | No | ||
| If there is any move-out path constraint, please inform site reuse planning immediately and propose tool ID swap. | |||
| Reuse tool configuration template needs to be populated based on the correct tool ID proposed for tool transfer. | |||
| Section 3. Tool Specific Information | |||
| OEM | AMAT | ||
| Tool Model | Reflexion LK | ||
| Process | STI | ||
| Software Version (include revision #) | Ip3B4.8_52 | ||
| System Power Rating | 208v 3 Ø 60Hz | ||
| Loading Configuration | 3 load ports (TDK) | ||
| System Configuration | ||||
| Description | ||||
| Tool: AMAT Reflexion LK | ||||
| Process Unit: Polisher | Model: Reflexion LK | |||
| Controller: eServer | ||||
| MFC/Pressure Unit: | ||||
| Drive Mechanisms: Mechanical / Pneumatic | ||||
| FOUP Opener: Pneumatic | ||||
| Gas System: CDA / HPN2 | ||||
| Exhaust System: Acid / Solvent | ||||
| *All OEM cable connecting between FAB to SubFab are require to be list out (Include length in mm) | ||||
| 1 | Polisher - 3 platens | |||
| 2 | Polisher - 4 carriers (5-Zone Contour) | |||
| 3 | Polisher - 8 UPAs (G4+) | |||
| 4 | Polisher - P1 slurry controllers: 20-200ml/min (x2); 50-500ml/min (x2) | |||
| 5 | Polisher - P2 slurry controllers: 20-200ml/min (x3) | |||
| 6 | Polisher - P3 slurry controllers: 20-200ml/min (x2); 50-500ml/min (x1) | |||
| 7 | Cleaner - Running Beam | |||
| 8 | Cleaner - Input, Buffer, Megasonics, Brush Box 1, Brush Box 2, Dryer (Desica - Marangoni) | |||
List of the missing and defective items:
FI Robot Controller
iAPC Server
Head Driver Box
Polisher DC Power Supply Assembly (AMAT; 0010-63313)
Cross Rotation Driver (AMAT; 1080-00262)
FI Robot
FI Fan Assembly
Platen Motor and Gearbox (7:1)
Cleaner FFU
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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