Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Applied Materials (AMAT) Producer GT Eterna FCVD

Asset ID: 209898

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Applied Materials (AMAT)

Producer GT Eterna FCVD

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 8/12/2022

Missing or damaged parts: Fab15 confirmed there were no missing

or damaged parts.

Configuration & photos Available: For further details of the configuration,

please ask your sales person.

 

Vendor Chm Model

Chemicals / Gases Used

 

Chm/Unit Position  1

NanoCure UV Twin

N2,NF3,Ar,O3Ar

 

Chm/Unit Position  2

ETERNA FCVD Twin

N2,NF3,Ar,O2,TSA,He,NH3,H2O

 

Chm/Unit Position  3

ETERNA FCVD Twin

N2,NF3,Ar,O2,TSA,He,NH3,H2O

 

Refer to ADCS to extract the Doc 2 to update the Tool/System Configuration

accordingly.  

 

System Configuration

 

Description

Tool:

Process Unit:  N/A

Model:

Controller: N/A

MFC/Pressure Unit:  STECZ700series

Drive Mechanisms:

FOUP Opener:  Sinfonia

Gas System:  N/A

Exhuast System:  N/A

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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