Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
PECVD (Chemical Vapor Deposition)
Date of Manufacture: 2008
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan City, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Platform type: Vector Express
Chamber type: TEOS AMP-DS
Process capability: TEOS oxide
System software: 6.07B93 Windows 2000
Fixload firmware: Rev 1.05
ATM robot firmware (friction end effector): WAVE2, 1.0T CF2.BA with Friction End Effector) 75-294243-00
Hardware Configuration - Frame
FOUP front end interface: 63-352409-00
Fixload FOUP RFID reader: 6M Hermos (2 FOUP)(integrated into Fixport) 63-292227-02
ATM robot end effector (friction type): 02-273860-03
Loadlock motion controller: 04-322903-00 V 2.80
Loadlock to atmosphere valve (VAT L-motion): 60-123331-00
Loadlock to chamber valve (SMC valve): 63-335469-00(XGT300-30-1A-X1 REV A.) Bonded Gate Valve
Front UI computer: 63-269347-00
Transfer module robot: NA
Transfer robot end effector: NA
Transfer module SMC valve: NA
Transfer module SMC valve gate: NA
Loadlock lift pin servomotor: Motor, Smart, Lift, Express, 33-289141-00
Transfer chamber throttle valve: NA
Loadlock vacuum gate valve: NA
"Loadlock pump isolation valve: 60-266065-00
Valve, Angle, KF25, Pneu, High Speed"
Mini environment AWC: installed
Loadlock baratrom: MKS 750B12TCE2GK - 10 Torr; 27-126062-00
Transfer module baratron: NA
FFU filter: none
Hardware Configuration - Chamber:
MPD EIOC2: ASSY; SIOC2 V5.00/5.3/B3 VECTOR, 02-321648-00
MACH IV EIOC0: ASSY; SIOC0 V5.00/5.3/B3 VECTOR, 02-321646-00
MACH IV EIOC1/E84/AWC: ASSY; SIOC1 V5.00/5.3/B3 VECTOR, 02-321647-00
MACH IV EC controller: NA
Showerhead assembly (13"): Showerhead; 13" RPC, 16-271392-00
Pedestal position 1 & 2: Pedestal; Novellium Pedestals for RPC/EXPRESS. Position 1. W/ Lift Holes, 02-297112-00(only PED1)
Pedestal position 3 & 4: Pedestal; Novellium Pedestals for RPC/EXPRESS. Position 2,3,4. W/O Lift Holes, 02-297113-00(PED2/3/4)
Captured lift pin assembly: 04-257354-00 (kit)
Remote plasma clean power supply: 27-261291-00 (GENERATOR,REACTIVE GAS,400.0W,4L ASTRON)
HFRF generator: 3000 Watt HF RF Generator. RPC, 27-346755-00 LFRF generator: 27-293721-00 GENERATOR,LF,2500.0W,PDX-2500,370-430KHZ
HFRF match network: RF MATCH,13.56MHZ,NAVIGATOR,SINGLE FREQ27-296376-00
LFRF match network: RF MATCH,400 KHZ,FIXED,RESISTIVE+CAPACIT 27-359862-00
Servo spindle: 02-276537-00 Spindle Assy, Servo, Common(not water cooled)
Pendulum valve assembly (pressure control valve): 04-146459-00 KIT,HEATED PENDULUM VALVE,VCTR
AMPDS quad inlet & divert valves: TUBE ASSY,ALD QUAD VALVE MNFLD,AMPDS,VXT 10-392789-00
AMPDS mechanical assembly: ASSY,VAPORIZER,MECHANICAL,1LIQ,ROUND,HDR, 02-368441-01
Hot chamber hardware: yes
MCA sapphire balls: Ball, MCA Sapphire ball, 22-100613-00
MCA sapphire pins: Pins; Sapphire MCA Pins, 15-315136-00
Ring, wafer lift: Carrier; Ring, Ceramic UPR Spindle/Chamber, 15-122178-00
RPC plasma source: Chamber, Plasma only. ASTRON HF, 27-324553-00
RPC distribution:
IR endpoint controller: DETECTOR; SIF4 IREPD VECTOR RPC, 27-450285-00
SIRF enclosure: 04-324886-00 SIRF Kit, VECTOR Express
HFRF power supply: N/A(only RPC)
Servo pin lift: 02-288189-00 ASSY,300MM, LIFT PIN ACTR(not servo)
Transfer plate: 02-279692-00
Filler plate, station 1: Plate, Filler, Hi-Temp, 15-270984-00
Filler plate, station 2: Plate, Filler, Hi-Temp, 15-270984-00
Filler plate, station 3 & 4: Plate, Filler, Hi-Temp, 15-270984-00
Double bonded gate: 22-298249-00 (just P/V o-ring, not bonded)
Inconel chamber screws: no use inconel screw
Gasbox: CESCVD44646A
Baratron 1, process module: MKS 627A11TBC (27-10343-00) 10Torr (Heated)
Baratron 2, process module: MKS 750B13TCE2GK 1000Torr 27-126667-00
Gas Panel (part#, gas species, size)
Line 1: 22-450167-00, He @ 20 SLM
Line 2: not used
Line 3: not used
Line 4: 22-450178-00, Ar @ 10 SLM
Line 5: 22-450165-00, N2 @ 10 SLM
Line 6: 22-450176-00, O2 @ 20 SLM
Line 7: 22-450178-00, Ar @ 10 SLM
Line 8: 22-450162-00, SiH4 @ 1.5 SLM
Line 9: 22-450179-00, CO2 @ 30 SLM
Line A: 22-450165-00, N2 @ 10 SLM
Line B: 22-450169-00, NH3 @ 10 SLM
Line C: 22-450174-00, NF3 @ 10 SLM
Line D: 22-450177-00, O2 @ 7 SLM
Line 14: 22-450175-00, O2 @ 10 SLM
Line 15: 22-450170-00, N2O @ 25 SLM
Line 16: NA
Line 17: NA
Line 18: NA
Line 19: NA
Line 20: NA
Line 21: NA
Line 22: NA
TEOS LFC 1: LFC,22ML/MIN,AMPDS,TEOS,1/8MVCR,DIGITAL,, 27-377144-00
TEOS LFC 2: LFC,2.5ML/MIN,AMPDS,TEOS,1/8MVCR,DIGITAL, 27-367677-00
Chemical Cabinet:
Model: Chemguard100
Vendor: Schumacher
Chemical stored: 19L bulk canister; 19L process canister
TEOS liquid delivery system:
Model: AMPds
Vendor: LAM
Heat wrap: NA
Loadlock pump:
Model: KIT,SINGLE KASHIYAMA NV60 LL PUMP,VCTR XPRS 04-322836-00
Vendor: KASHIYAMA
Heater Jacket @ foreline: NA
Heater Jacket @ exhaust to scrubber: NA
Process Chamber Pump
Model: IXH3050
Vendor: BOC Edwards
Heater Jacket @ foreline: 150 C
Heater Jacket @ exhaust to scrubber: 150 C
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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