Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Producer SE PECVD SILANE

Asset ID: 12230

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Applied Materials (AMAT)

Producer SE PECVD SILANE

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Process: NIT
Configured with 3 chambers

Technology: PECVD
Platform Type: PRODUCER SE

System Software
System software: B2.8_27
FiCGUI: fB4.40_19
GP: gB7.00_20
DTauMacros: 5.1.12.0

Chamber Configuration
Chamber Type: PECVD
Lid: none micrometers
Lid Mixing Insert: no use
Liner: NA
Blocker: 0020-70842
Faceplate: 0020-84596
NDIR Endpoint Detector: No
Heater: Heater ASSY, HA12, MC, CIP
Slit Valve: Valqua
Isolation Valve: 3870-03210
Throttle Valve: 0190-19203
Heater Lift Driver: 0190-13840
RPS: 0920-00013

Gas Box Configuration: surface mount TYPE FOR MFC
Gas Line 1: SiH4 Lo 0.5SLM
Gas Line 2: SiH4 2SLM
Gas Line 3: B2H6 4SLM
Gas Line 4: H2 2SLM
Gas Line 5: NF3 5SLM
Gas Line 6: NH3 0.7SLM
Gas Line 7: HE 15SLM
Gas Line 8: AR 10SLM
Gas Line 9: empty
Gas Line 10: N2O Hi 15SLM
Gas Line 11: N2O Lo 2SLM
Gas Line 12: N2 25SLM
Gas Line 13: empty
Gas Line 14: empty
Gas Line 15: empty
Gas Line 16: empty
Liquid 1: empty
Liquid 2: empty
Liquid 3: empty
Injector-TEB: empty
Injector-TEPO: empty
Injector-TEOS: empty

Process Pump/Abatement
BOC Edwards: Alcatel ADS1202H
Ozone Rack Cooling: N/A

Kit Parts:
BLOCKER PLATE: 0020-70842
FACE PLATE: 0020-84596
GASBOX: 0040-86768
TOP CERAMIC LINER: 0200-02395
MIDDLE CERAMIC LINER: 0200-02396
BOTTOM CERAMIC LINER: 0200-02397
ALUMINUM PUMPING RING: 0200-02407/0200-02408
VACUUM CHUCK HEATER ASSY: 0010-24301
LIFT PINS: 0200-03270
LIFT RING Captive 300MM PRODUCER SE: N/A
LIFT HOOP: 0200-01991
ISOLATOR: 0200-04235
LIFT RING SCREW: 0021-26158
ISO VALVE: 0190-08201
THROTTLE VALVE: 0190-12708

Abatement System
Model: 4xinlet
Vendor: DAS
Heat wrap: 150

Heat Exchanger
Model: H2000
Vendor: SMC Thermo Chiller

Process Chamber Pump
Vendor: BOC Edwards
Heater Jacket @foreline: Yes
Heater Jacket @ exhaust to scrubber: Yes

Missing/Damaged Parts List
None report, please inspect tool to reconfirm
Dry pumps not included

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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