Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) Trias Ti/TiN Chamber

Asset ID: 209959

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Tokyo Electron Ltd. (TEL)

Trias Ti/TiN Chamber

Parts/Peripherals

Deposition Equipment

Equipment details:

Date of Manufacture: 2009

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Trias Ti/TiN Chamber only Qty 1


Chamber 4 SN: TTN00675


Gaspanel Configuration   

Mass Flow Controller(ClF3 500 sccm)   ClF3 500sccm Hitachi Metals SFC1470FAMC-4UGLN

Mass Flow Controller(N2 600/200 sccm)   N2 600/2000sccm Hitachi Metals SFC1480FAPDMC-4UGL

Mass Flow Controller(NH3 5000 sccm)   NH3 5000sccm Hitachi Metals SFC1481FAMC-4UGL

Mass Flow Controller(NH3 300 sccm)   NH3 300sccm Hitachi Metals SFC1480FAMC-4UGL

Mass Flow Controller(N2 600/200 sccm)   N2 600/2000sccm Hitachi Metals SFC1480FAPDMC-4UGL

Mass Flow Controller( NH3 1000 sccm)   NH3 1000sccm Hitachi Metals SFC1480FAMC-4UGLK

DLI Vaporizer TiCl4 100sccm   TiCl4 100sccm STEC VC1310-UC-19 SEF-8240SL-UC-VM03

Heater Bottm Purge   N2 300sccm Hitachi Metals 280ERC-4VQ


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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