Macquarie Semiconductor and Technology on behalf of Macquarie Asset Finance Japan Limited

KLA-Tencor Corp. Surfscan SP3

Asset ID: 208742

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KLA-Tencor Corp.

Surfscan SP3

Particle Measurement

Metrology Equipment

Equipment details:

Date of Manufacture: 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Japan

Available date: 1/28/2022

Main System

Surfscan SP3 Scan Module 1 unit

IMC (image computer) 1 unit

1 heat exhaust blower unit

Handling Options:

Vacuum Chuck Triple FIMS handler (3 x 300 mm) 1 set


NGS Version:6.20.6360

IMC Version: 2.30.6360

Standard Options

1 Oblique Incident 1 set

2 ST mode 1 set

3 2mm edge exclusion area 1 set

4 Defect classification function (Slipline, Scratch, Cluster, LPD-N, LPD-ES, RBB) 1 set

5 Dual Scan (Normal + Oblique Scan) 1 set

6 Partial Dual Scan (Secondly Inspection Region) 1 set

7 SURFmonitor Essentials 1 set

8 Optical filter (Fluorescence Filter) 1 set

9 Spatial filters (20 degrees, 40 degrees, Back) 1 set

10 Environmental optics (COE) kit 1 set

11 Cool White Panels (exterior panel) 1 set


1 Normal incident P/N: 0274498-000 1 set

2 HT mode P/N: 0274501-000 1 set

3 HS mode P/N: 0274499-000 1 set

4 LPM (Large Particle Mode) P/N: 0262045-000 1 set

5 Custom Film Generator (Auto Cal Film) P/N: 0395928-000 1 set

6 300mm silica wafer set P/N: 0302187-000 1 set

7 300mm XY coordinate standard wafer P/N: 0016628-000 1 set

8 300mm SP3 Haze Normalization Wafer Set P/N: 0356234-000 1 set

9 NFS client P/N: 0306847-000 1 set

10 NGS desktop software P/N: 0307637-000 1 set

Installed Software Options

Illumination Oblique

Illumination Normal

Throughput HS

Throughput ST

Throughput HT

Desktop SW

Haze Line Classification






Mask 20 Degrees

Mask 40 Degrees


SurfACEQuality low k

SurfACEQuality Rough 1

SurfACEQuality Rough 2

SurfACEQuality Smooth

SurfACEQuality Very Smooth

SurfACEQuality Medium

Filter Flourescence

Mask Back


Dual Incidence

Rule Based Binning

Dual Incidence Obl Obl

M53 NormStyle

Enhanced LPD Detection


Mask XFS H3

InstSubType Classic Plus

Large Particle Mode



Sub1nm EdgeExclusion

Enh User Security

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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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